Abstract: Milling using a scanning probe microscope with a diamond tip removes a layer of material and produces a surface that is sufficiently smooth that it can be probed using a nanoprober to provide site-specific sample preparation and delayering. Diamond milling provides in situ, localized, precision delayering inside of a nanoprobing tool, thereby decreasing the turnaround time for integrated circuit analysis. Furthermore, unlike focused ion beam delayering, the diamond tip should not alter the electrical characteristics of the integrated circuit.

Abstract: A method and apparatus for performing optical microscopy in one to three dimensions employs a spectral self-interference fluorescent microscopy technique that includes providing at least one fluorescent microscopy sample, at least one objective lens, and at least one reflecting surface. The fluorescent sample is disposed between the objective lens and the reflecting surface, the distance from the sample to the reflecting surface being several to several tens times an excitation wavelength. Excitation light causes the fluorescent sample to emit light, at least a portion of which is reflected by the reflecting surface. The objective lens collects the reflected light and the light emitted directly by the fluorescent sample. The direct and reflected light interfere causing spectral oscillations in the emission spectrum. The periodicity and the peak wavelengths of the emission spectrum are spectroscopically analyzed to determine the optical path length between the fluorescent sample and the reflecting surface.

Abstract: A method and apparatus for performing optical microscopy in one to three dimensions employs a spectral self-interference fluorescent microscopy technique that includes providing at least one fluorescent microscopy sample (220a, 220b), at least one objective lens (201), and a reflecting surface (204). The fluorescent sample is disposed between the objective lens and the reflecting surface, the distance (d1, d2) from the sample to the reflecting surface is several to several tens times an excitation wavelength. Excitation light (216) causes the fluorescent sample to emit light (214), at least a portion (214b) of which is reflected by the reflecting surface. The objective lens collects both the reflected light and the light emitted directly by the fluorescent sample (214a). The direct and reflected light interferences causing spectral oscillations in the emission spectrum.