Abstract: A multi-axis mixing apparatus includes a first motor and a frame supporting the first motor, the first motor configured to selectively rotate a first rotatable assembly about a first axis. The apparatus also includes a second rotatable assembly rotatably supported by the first rotatable assembly, where the second rotatable assembly is rotatable about a second axis. The second rotatable assembly includes a clamping mechanism configured to receive and hold a container containing contents to be mixed, where when the first motor causes the first rotatable assembly to rotate about the first axis, the rotation of the first rotatable assembly about the first axis causes the second rotatable assembly to rotate about the second axis, and where the second axis is substantially perpendicular to the first axis.

Abstract: A multi-axis mixing apparatus is disclosed that includes a housing and a controller operatively connected to a first motor and a second motor. The apparatus includes a frame supporting the first motor configured to selectively rotate a rotatable assembly. The rotatable assembly supports and provides an operative connection to the second motor configured to selectively rotate a rotatable sub-assembly. The rotatable sub-assembly includes a mechanism configured to receive and hold a container containing contents to be mixed, and the controller is configured to independently operate the first and second motors to mix the contents.

Abstract: A method for flushing gas pockets from a manifold that forms a part of a liquid sampling system that is compatible with a chemical-mechanical polishing system is described. A flushing liquid, e.g., ultra pure water, is introduced into, and expelled from, the manifold to expel gas pockets from the manifold. The method comprises the steps of opening a manifold vent, filling the manifold with the flushing liquid, and closing the vent to increase the velocity of the flushing liquid flowing through the manifold. The introduction of the flushing liquid is discontinued, and thereafter, resumed. The discontinuation and resumption steps are preferably repeated The manifold is thus flushed of gas pockets.

Abstract: An apparatus and method for drawing a sample of a chemical-mechanical polishing slurry for analysis of at least one property, e.g., particle size distribution, is described.

Abstract: A flow-indicating device is provided, comprising a tubular body adapted to direct a flow therethrough. The body has opposed ends, with one end being a downstream end, and has a flow element disposed therein. A shaping block is operably engaged with the body so as to form a constricted portion between the ends, the constricted portion of the body defining a constricted orifice having a downstream side. The constricted orifice is configured to prevent the flow element from passing therethrough. The flow element is disposed on the downstream side of the constricted portion and is configured to engage the constricted orifice when the flow is below a flow rate and to move toward the downstream end of the body as the flow increases over the flow rate to thereby indicate the flow through the body.

Abstract: A flow-indicating device is provided, comprising a tubular body adapted to direct a flow therethrough. The body has opposed ends, with one end being a downstream end, and has a flow element disposed therein. A shaping block is operably engaged with the body so as to form a constricted portion between the ends, the constricted portion of the body defining a constricted orifice having a downstream side. The constricted orifice is configured to prevent the flow element from passing therethrough. The flow element is disposed on the downstream side of the constricted portion and is configured to engage the constricted orifice when the flow is below a flow rate and to move toward the downstream end of the body as the flow increases over the flow rate to thereby indicate the flow through the body.

Abstract: An apparatus and method for drawing a sample of a chemical-mechanical polishing slurry for analysis of at least one property, e.g., particle size distribution, is described.

Abstract: A method for flushing gas pockets from a manifold that forms a part of a liquid sampling system that is compatible with a chemical-mechanical polishing system is described. A flushing liquid, e.g., ultra pure water, is introduced into, and expelled from, the manifold to expel gas pockets from the manifold. The method comprises the steps of opening a manifold vent, filling the manifold with the flushing liquid, and closing the vent to increase the velocity of the flushing liquid flowing through the manifold. The introduction of the flushing liquid is discontinued, and thereafter, resumed. The discontinuation and resumption steps are preferably repeated The manifold is thus flushed of gas pockets.