Patents by Inventor Stephen John Coles

Stephen John Coles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of treating gas
    Patent number: 8480861
    Abstract: In a method of treating a gas exhausted from a process chamber, the exhaust gas is conveyed to a vacuum pump (20) and a nitrogen purge gas is added to the exhaust gas for pumping with the exhaust gas. Gas exhaust from the pump is conveyed to an abatement device (28) for abating the exhaust gas. The amount of purge gas added to the exhaust gas is adjusted in response to a variation of the composition of the exhaust gas, or the composition of the gas supplied to the process chamber, to optimise the abatement of the exhaust gas.
    Type: Grant
    Filed: September 28, 2006
    Date of Patent: July 9, 2013
    Assignee: Edwards Limited
    Inventors: James Robert Smith, Marilena Radoiu, Stephen John Coles