Abstract: In electron multiplying charge coupled device (EMCCD) image sensors, electron traps in the dielectric stack underneath charge multiplication electrodes may cause undesirable gain ageing. To reduce the gain ageing drift effect, a dielectric stack may be formed that does not include electron traps in regions underneath charge multiplication electrodes. To accomplish this, silicon nitride in the dielectric stack may be removed in regions underneath the charge multiplication electrodes. The EMCCD image sensors can thus be fabricated with a stable charge carrier multiplication gain during their operational lifetime.

Abstract: An image sensor includes a substrate having photosensitive areas; an insulator spanning at least a portion of the substrate; and a first and second layer of a multi-layer metallization structure, wherein the first layer forms light shield regions over selected portions of the photosensitive area as well forming circuit interconnections and barrier regions to prevent spiking into the substrate or gates at contacts in the non-imaging area; and the second layer spanning the interconnections and barrier regions of the first layer only over the non-imaging areas and the second layer overlays edges of the first layer.

Abstract: An image sensor includes a substrate having photosensitive areas; an insulator spanning the substrate; and a first and second layer of a multi-layer metallization structure, wherein the first layer forms light shield regions over selected portions of the photosensitive area as well forming circuit interconnections and barrier regions to prevent spiking into the substrate or gates at contacts in the non-imaging area; and the second layer spanning the interconnections and barrier regions of the first layer only over the non-imaging areas and the second layer overlays edges of the first layer.