Patents by Inventor Stephen Kudelka

Stephen Kudelka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for expanding trenches by an anisotropic wet etch
    Patent number: 6426254
    Abstract: In accordance with the present invention, a method for expanding trenches includes the steps of forming a trench in a substrate, preparing surfaces withIn the trench by etching the surfaces with a wet etchant to provide a hydrogen terminated silicon surface and anisoropically wet etching the trench to expand the trench.
    Type: Grant
    Filed: June 9, 1999
    Date of Patent: July 30, 2002
    Assignee: Infineon Technologies AG
    Inventors: Stephen Kudelka, Alexander Michaelis, Dirk Tobben