Patents by Inventor Stephen M. Cea

Stephen M. Cea has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090020792
    Abstract: A method of forming an isolated tri-gate semiconductor body comprises patterning a bulk substrate to form a fin structure, depositing an insulating material around the fin structure, recessing the insulating material to expose a portion of the fin structure that will be used for the tri-gate semiconductor body, depositing a nitride cap over the exposed portion of the fin structure to protect the exposed portion of the fin structure, and carrying out a thermal oxidation process to oxidize an unprotected portion of the fin structure below the nitride cap. The oxidized portion of the fin isolates the semiconductor body that is being protected by the nitride cap. The nitride cap may then be removed. The thermal oxidation process may comprise annealing the substrate at a temperature between around 900° C. and around 1100° C. for a time duration between around 0.5 hours and around 3 hours.
    Type: Application
    Filed: July 18, 2007
    Publication date: January 22, 2009
    Inventors: Rafael Rios, Jack Kavalieros, Stephen M. Cea
  • Patent number: 7473591
    Abstract: Various methods for forming a layer of strained silicon in a channel region of a device and devices constructed according to the disclosed methods. In one embodiment, a strain-inducing layer is formed, a relaxed layer is formed on the strain-inducing layer, a portion of the strain-inducing layer is removed, which allows the strain-inducing layer to relax and strain the relaxed layer.
    Type: Grant
    Filed: December 1, 2005
    Date of Patent: January 6, 2009
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Ravindra Soman, Ramune Nagisetty, Sunit Tyagi, Sanjay Natarajan
  • Patent number: 7452764
    Abstract: A method including forming a device on a substrate, the device including a gate electrode on a surface of the substrate; a first junction region and a second junction region in the substrate adjacent the gate electrode; and depositing a straining layer on the gate electrode.
    Type: Grant
    Filed: March 1, 2005
    Date of Patent: November 18, 2008
    Assignee: Intel Corporation
    Inventors: Thomas Hoffmann, Stephen M. Cea, Martin D. Giles
  • Publication number: 20080142841
    Abstract: A method of a bulk tri-gate transistor having stained enhanced mobility and its method of fabrication. The present invention is a nonplanar transistor having a strained enhanced mobility and its method of fabrication. The transistor has a semiconductor body formed on a semiconductor substrate wherein the semiconductor body has a top surface on laterally opposite sidewalls. A semiconductor capping layer is formed on the top surface and on the sidewalls of the semiconductor body. A gate dielectric layer is formed on the semiconductor capping layer on the top surface of a semiconductor body and is formed on the capping layer on the sidewalls of the semiconductor body. A gate electrode having a pair of laterally opposite sidewalls is formed on and around the gate dielectric layer. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: February 4, 2008
    Publication date: June 19, 2008
    Inventors: Nick Lindert, Stephen M. Cea
  • Patent number: 7326634
    Abstract: A method of a bulk tri-gate transistor having stained enhanced mobility and its method of fabrication. The present invention is a nonplanar transistor having a strained enhanced mobility and its method of fabrication. The transistor has a semiconductor body formed on a semiconductor substrate wherein the semiconductor body has a top surface on laterally opposite sidewalls. A semiconductor capping layer is formed on the top surface and on the sidewalls of the semiconductor body. A gate dielectric layer is formed on the semiconductor capping layer on the top surface of a semiconductor body and is formed on the capping layer on the sidewalls of the semiconductor body. A gate electrode having a pair of laterally opposite sidewalls is formed on and around the gate dielectric layer. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: March 22, 2005
    Date of Patent: February 5, 2008
    Assignee: Intel Corporation
    Inventors: Nick Lindert, Stephen M. Cea
  • Patent number: 7154118
    Abstract: A method of a bulk tri-gate transistor having stained enhanced mobility and its method of fabrication. The present invention is a nonplanar transistor having a strained enhanced mobility and its method of fabrication. The transistor has a semiconductor body formed on a semiconductor substrate wherein the semiconductor body has a top surface on laterally opposite sidewalls. A semiconductor capping layer is formed on the top surface and on the sidewalls of the semiconductor body. A gate dielectric layer is formed on the semiconductor capping layer on the top surface of a semiconductor body and is formed on the capping layer on the sidewalls of the semiconductor body. A gate electrode having a pair of laterally opposite sidewalls is formed on and around the gate dielectric layer. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: March 31, 2004
    Date of Patent: December 26, 2006
    Assignee: Intel Corporation
    Inventors: Nick Lindert, Stephen M. Cea
  • Patent number: 7129533
    Abstract: A method and apparatus to form a high-concentration, indium-fluorine retrograde well within a substrate. The indium-fluorine retrograde well includes an indium concentration greater than about 3E18/cm3.
    Type: Grant
    Filed: December 31, 2003
    Date of Patent: October 31, 2006
    Assignee: Intel Corporation
    Inventors: Cory E. Weber, Mark A. Armstrong, Stephen M. Cea, Giuseppe Curello, Sing-Chung Hu, Aaron D. Lilak, Max Wei
  • Patent number: 7102141
    Abstract: Flash lamp apparatuses that generate electromagnetic radiation with wavelengths greater than and/or less than a defined range of wavelengths are disclosed.
    Type: Grant
    Filed: September 28, 2004
    Date of Patent: September 5, 2006
    Assignee: Intel Corporation
    Inventors: Jack Hwang, Stephen M. Cea, Paul Davids, Karson L. Knutson
  • Patent number: 7019326
    Abstract: Various methods for forming a layer of strained silicon in a channel region of a device and devices constructed according to the disclosed methods. In one embodiment, a strain-inducing layer is formed, a relaxed layer is formed on the strain-inducing layer, a portion of the strain-inducing layer is removed, which allows the strain-inducing layer to relax and strain the relaxed layer.
    Type: Grant
    Filed: November 14, 2003
    Date of Patent: March 28, 2006
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Ravindra Soman, Ramune Nagisetty, Sunit Tyagi, Sanjay Natarajan
  • Patent number: 6982433
    Abstract: There is disclosed an apparatus including a substrate defining an interior of the apparatus, a device exterior to the substrate including a gate electrode, and a straining layer exterior to the gate electrode and exterior to the substrate.
    Type: Grant
    Filed: June 12, 2003
    Date of Patent: January 3, 2006
    Assignee: Intel Corporation
    Inventors: Thomas Hoffman, Stephen M. Cea, Martin D. Giles
  • Patent number: 6936505
    Abstract: A method of forming a shallow junction in a semiconductor substrate is disclosed. The method of one embodiment comprises preamorphizing a first region of a semiconductor substrate to a first depth and implanting recrystallization inhibitors into a second region of the semiconductor substrate. The second region is a part of the first region and has a second depth. Next, a dopant is implanted into a third region of the semiconductor substrate with the third region being a part of the second region and a first annealing is performed to selectively recrystallize the first region that has no recrystallization inhibitors. Next, a second annealing is performed to recrystallize the second region and diffuse the dopant within the second region.
    Type: Grant
    Filed: May 20, 2003
    Date of Patent: August 30, 2005
    Assignee: Intel Corporation
    Inventors: Patrick H. Keys, Stephen M. Cea
  • Patent number: 6838329
    Abstract: A method and apparatus to form a high-concentration, indium-fluorine retrograde well within a substrate. The indium-fluorine retrograde well includes an indium concentration greater than about 3E18/cm3.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: January 4, 2005
    Assignee: Intel Corporation
    Inventors: Cory E. Weber, Mark A. Armstrong, Stephen M. Cea, Giuseppe Curello, Sing-Chung Hu, Aaron D. Lilak, Max Wei
  • Publication number: 20040253776
    Abstract: There is disclosed an apparatus including a substrate defining an interior of the apparatus, a device exterior to the substrate including a gate electrode, and a straining layer exterior to the gate electrode and exterior to the substrate.
    Type: Application
    Filed: June 12, 2003
    Publication date: December 16, 2004
    Inventors: Thomas Hoffmann, Stephen M. Cea, Martin D. Giles
  • Publication number: 20040235280
    Abstract: A method of forming a shallow junction in a semiconductor substrate is disclosed. The method of one embodiment comprises preamorphizing a first region of a semiconductor substrate to a first depth and implanting recrystallization inhibitors into a second region of the semiconductor substrate. The second region is a part of the first region and has a second depth. Next, a dopant is implanted into a third region of the semiconductor substrate with the third region being a part of the second region and a first annealing is performed to selectively recrystallize the first region that has no recrystallization inhibitors. Next, a second annealing is performed to recrystallize the second region and diffuse the dopant within the second region.
    Type: Application
    Filed: May 20, 2003
    Publication date: November 25, 2004
    Inventors: Patrick H. Keys, Stephen M. Cea
  • Publication number: 20040188767
    Abstract: A method and apparatus to form a high-concentration, indium-fluorine retrograde well within a substrate. The indium-fluorine retrograde well includes an indium concentration greater than about 3E18/cm3.
    Type: Application
    Filed: March 31, 2003
    Publication date: September 30, 2004
    Inventors: Cory E. Weber, Mark A. Armstrong, Stephen M. Cea, Giuseppe Curello, Sing-Chung Hu, Aaron D. Lilak, Max Wei
  • Publication number: 20040192055
    Abstract: A method and apparatus to form a high-concentration, indium-fluorine retrograde well within a substrate. The indium-fluorine retrograde well includes an indium concentration greater than about 3E18/cm3.
    Type: Application
    Filed: December 31, 2003
    Publication date: September 30, 2004
    Inventors: Cory E. Weber, Mark A. Armstrong, Stephen M. Cea, Giuseppe Curello, Sing-Chung Hu, Aaron D. Lilak, Max Wei