Abstract: A fluidized bed reactor with one or more stages each stage having a heating section located below a reacting section and a mechanism that pulses granules back and forth between the heating and reacting sections, separate injectors for silicon containing gases non silicon containing gases, heaters to heat the non silicon containing gases above the reaction temperature and the silicon containing gases to a temperature just below their decomposition temperature. The heater for the silicon containing gases controls the condensing vapor of a heat transfer fluid to a temperature below the decomposition temperature of the silicon containing gases. An enclosed noncontaminating sieving device selectively removes product and recycles undersize material. A weigh cell with frequency analysis capability provides information on the weight of the reactor and the force exerted by the pulsing action of the granules.

Abstract: Methods for Heating a Fluidized Bed Silicon Deposition Apparatus with the steps of: one or more heaters and entries to the reactor for the gas or gases which can be heated without decomposition separate from one or more heaters and entries for the gas or gases which decompose to form silicon when heated, heating the gas or gases which do not decompose to temperatures between 400-2000 C., more preferably 800-1600 C., heating the gases which do decompose thermally to temperatures less than the temperature at which they decompose, typically 25-400 C., preferably 300-350 C., and alternatively or in combination with the above steps also providing a means for removal of the silicon beads, heating the beads to a temperature between 800-1200 C. and preferably to a temperature between 900-1100 C. and returning the beads to the reactor. Providing localized cooling of the entries for the thermally decomposable gases.

Abstract: A Machine for Production of Granular Silicon which provides a fluidized bed reactor with one or more stages each stage having a heating section located below a reacting section and a mechanism that pulses granules back and forth between the heating and reacting sections, separate cooled injectors for silicon containing gases and uncooled injectors for non silicon containing gases, heaters to heat the non silicon containing gases above the reaction temperature and the silicon containing gases to a temperature just below their decomposition temperature. In the preferred embodiment the heater for the silicon containing gases controls the condensing vapor of a heat transfer fluid to a temperature below the decomposition temperature of the silicon containing gases. The preferred design for cooling the injectors uses a water-cooled microchannel design, which minimizes parasitic heat losses.

Abstract: A Method for Improving the efficiency of a silicon purification process is by controlling the temperature and composition of the effluent to a feedstock recovery composition and temperature, rapidly quenching the effluent at or near the recovery composition, separating the gases from the liquids, sending the gases to conventional hydrogen recovery and recycle facilities, separating the hydrohalosilanes from silicon tetrahalide, returning the hydrohalosilanes to the inlet of the deposition reactor, using all or some of the silicon tetrahalide to control the composition and temperature of the effluent and separately heating the hydrogen and any silicon tetrahalide returned to the decomposition reactor to a temperature greater than 400 C. and separately injecting them into the decomposition reactor.

Abstract: Silicon beads are produced by chemical vapor deposition (CVD) on seed particles generated internal to a CVD reactor. The reactor has multiple zones, including an inlet zone where beads are maintained in a submerged spouted bed and an upper zone where beads are maintained in a bubbling fluidized bed. A tapered portion of the upper zone segregates beads by size. Systems for inspecting, sorting and transporting product beads are also disclosed.

Abstract: Silicon beads are produced by chemical vapor deposition (CVD) on seed particles generated internal to a CVD reactor. The reactor has multiple zones, including an inlet zone where beads are maintained in a submerged spouted bed and an upper zone where beads are maintained in a bubbling fluidized bed. A tapered portion of the upper zone segregates beads by size. Systems for inspecting, sorting and transporting product beads are also disclosed.

Abstract: An apparatus and process for adsorbing volatile organic compounds, or VOCs, and efficiently regenerating adsorbent material in an emission control system. Flue gas, emitted from a combustion unit burning an outside fuel and desorbed VOCs, is humidified and cooled with a set of water injectors. The resultant humidified flue gas is directed through the adsorbent material, which is rapidly superheated without pressurization. A method for controlling the regeneration cycle of the emission control system includes at least three sensor configurations including a breakthrough sensor, a desorbed gas sensor and a flue gas temperature sensor.