Abstract: The gate valve includes a valve housing (12) having a fluid conduit (14) and defining a valve seat (16) and a support surface (18), a seal plate (20), a counter plate (22) having cushion (72) vulcanized to a surface facing the support surface (18), and an actuator (34) for moving the seal plate and the counter plate between respective open and closed positions. The cushion is configured to prevent metal-to-metal contact between the counter plate and the support surface of the valve housing.

Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.