Patents by Inventor Stephen Melnychuk

Stephen Melnychuk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Extreme ultraviolet light source
    Publication number: 20080023657
    Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
    Type: Application
    Filed: July 20, 2007
    Publication date: January 31, 2008
    Applicant: Cymer, Inc.
    Inventors: Stephen Melnychuk, William Partlo, Igor Fomenkov, I. Oliver, Richard Ness, Norbert Bowering, Oleh Khodykin, Curtis Rettig, Gerry Blumenstock, Timothy Dyer, Rodney Simmons, Jerzy Hoffman, R. Johnson