Patents by Inventor Stephen P. Klepner

Stephen P. Klepner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4514254
    Abstract: Pinholes opened though insulating layers in Josephson integrated circuits are sealed by this post-etch anodization process. Josephson junction integrated circuits, in part, contain patterned metal films on an insulated groundplane. The patterns of conductors are created by adding a complete metal film over the insulating layers and subtractively etching to leave the desired conductor pattern. Pinholes in the underlying etch-stop insulating layer, in areas not covered by the remaining metal pattern, can be created during the subtractive etching process. Such pinholes may occur at sites made susceptible by contaminants, including flakes of process materials, which are present despite efforts to eliminate contaminants. Such pinholes provide unwanted conductive paths between the groundplane and subsequent metallization. Failures resulting from the effects of such unwanted conductive paths occur in a fashion not easily subject to identification, much less prevention.
    Type: Grant
    Filed: September 26, 1983
    Date of Patent: April 30, 1985
    Assignee: International Business Machines Corporation
    Inventor: Stephen P. Klepner