Patents by Inventor Stephen Paul DeOrnellas

Stephen Paul DeOrnellas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated semiconductor wafer processing system
    Patent number: 5672239
    Abstract: An improved apparatus and method which offers an integral pre-strip rinse operation between etching operation and stripping operation. The present invention is designed to allow a semiconductor wafer to undergo sequential processing of dry etching, wet pre-strip rinsing, dry photoresist stripping, and wet final rinsing in a single system.
    Type: Grant
    Filed: May 10, 1995
    Date of Patent: September 30, 1997
    Assignee: Tegal Corporation
    Inventor: Stephen Paul DeOrnellas