Abstract: A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.

Abstract: A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.

Abstract: The present invention is concerned with an improved fuel cell stack assembly comprising a metal base plate on which is mounted at least one fuel cell stack and a metal end plate, each stack comprising at least one fuel cell stack layer that comprises at least one fuel cell and at least one electrically insulating compression gasket, wherein a skirt is attached to the base and end plates enclosing the stack and is under tension therebetween so as to maintain a compressive force through the stack, thereby obviating the need for tie-bars.

Abstract: A system comprising: a semiconductor processing tool (102) comprising a process chamber (108); a valve module (104) configured to receive a fluid from the process chamber (108) and to selectably direct a flow of said fluid; and a cooling apparatus (402) configured to supply a flow of a cooling fluid to the process chamber (108); wherein the valve module (104) and the cooling apparatus (402) are arranged in a stacked configuration.

Abstract: The present invention is concerned with an improved fuel cell stack assembly comprising a metal base plate on which is mounted at least one fuel cell stack and a metal end plate, each stack comprising at least one fuel cell stack layer that comprises at least one fuel cell and at least one electrically insulating compression gasket, wherein a skirt is attached to the base and end plates enclosing the stack and is under tension therebetween so as to maintain a compressive force through the stack, thereby obviating the need for tie-bars.

Abstract: The present invention is concerned with an improved fuel cell stack assembly (10) comprising a metal base plate (20) on which is mounted at least one fuel cell stack (30) and a metal end plate (40), each stack comprising at least one fuel cell stack layer (50) that comprises at least one fuel cell (101, 102) and at least one electrically insulating compression gasket (110), wherein a skirt (130) is attached to the base and end plates enclosing the stack and is under tension therebetween so as to maintain a compressive force through the stack, thereby obviating the need for tie-bars.

Abstract: A stack (1) of intermediate temperature, metal-supported, solid oxide fuel cell units (10), each unit comprising a metal support substrate (12), a spacer (22) and an interconnect (30) that each have compression bolt holes (34), fuel inlet port (33), fuel outlet port (32) and air outlet (17) therein, wherein bolt voids (34) are formed by aligning the bolt holes and a further void (17) by aligning the air outlets, and the voids are vented, for example, to the environment or further void to prevent the build-up of fuel, moisture or ions.

Abstract: A stack (1) of intermediate temperature, metal-supported, solid oxide fuel cell units (10), each unit comprising a metal support substrate (12), a spacer (22) and an interconnect (30) that each have compression bolt holes (34), fuel inlet port (33), fuel outlet port (32) and air outlet (17) therein, wherein bolt voids (34) are formed by aligning the bolt holes and a further void (17) by aligning the air outlets, and the voids are vented, for example, to the environment or further void to prevent the build-up of fuel, moisture or ions.

Abstract: The present invention is concerned with an improved fuel cell stack assembly (10) comprising a metal base plate (20) on which is mounted at least one fuel cell stack (30) and a metal end plate (40), each stack comprising at least one fuel cell stack layer (50) that comprises at least one fuel cell (101, 102) and at least one electrically insulating compression gasket (110), wherein a skirt (130) is attached to the base and end plates enclosing the stack and is under tension therebetween so as to maintain a compressive force through the stack, thereby obviating the need for tie-bars.