Patents by Inventor Stephen R. Matte
Stephen R. Matte has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20080267790Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: ApplicationFiled: July 10, 2008Publication date: October 30, 2008Inventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein, Steven C. Rosner
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Patent number: 7413411Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: April 27, 2005Date of Patent: August 19, 2008Assignee: Brooks Automation, Inc.Inventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matté, Martin Stein, Steven C. Rosner
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Patent number: 6902378Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: March 8, 2002Date of Patent: June 7, 2005Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matté, Martin Stein, Steven C. Rosner
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Patent number: 6571821Abstract: A valve includes a valve housing having a fluid conduit communicating between an inlet port and an outlet port, a valve closure member that is movable between a closed position and an open position, and a radiation-absorbing coating on at least a part of the fluid conduit. The radiation-absorbing coating may be disposed on inside surfaces of mounting flanges of the valve. The coating may be black chrome or a black anodized surface, for example.Type: GrantFiled: July 18, 2001Date of Patent: June 3, 2003Assignee: Varian, Inc.Inventors: Stephen R. Matte, William G. Foley
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Publication number: 20030010383Abstract: A valve includes a valve housing having a fluid conduit communicating between an inlet port and an outlet port, a valve closure member that is movable between a closed position and an open position, and a radiation-absorbing coating on at least a part of the fluid conduit. The radiation-absorbing coating may be disposed on inside surfaces of mounting flanges of the valve. The coating may be black chrome or a black anodized surface, for example.Type: ApplicationFiled: July 18, 2001Publication date: January 16, 2003Inventors: Stephen R. Matte, William G. Foley
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Patent number: 6461113Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: December 3, 1999Date of Patent: October 8, 2002Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matté, Martin Stein, Steven C. Rosner
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Publication number: 20020094277Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: ApplicationFiled: March 8, 2002Publication date: July 18, 2002Applicant: Helix Technology CorporationInventors: Peter W. Gaudet, Michael J. Eacobacci, Robert J. Lepofsky, David E. Roche, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein, Steven C. Rosner
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Patent number: 6155059Abstract: A cryopump including a radiation shield having an interior surrounded by at least one wall. The radiation shield has an opening through which gases are cryopumped into the interior. A frontal cryopanel array is positioned near the opening for condensing high boiling point gases. The radiation shield and frontal cryopanel array are cooled to a first temperature. First primary cryopanel surfaces extend near the wall within the interior of the radiation shield and are cooled to a second temperature below the first temperature for condensing low boiling point gases near the wall while leaving a central gas flow pathway from the opening past the first primary cryopanel surfaces. Second primary cryopanel surfaces cooled to about the second temperature are positioned within the interior of the radiation shield and include adsorbent for adsorbing very low boiling point gases.Type: GrantFiled: January 13, 1999Date of Patent: December 5, 2000Assignee: Helix Technology CorporationInventors: Stephen R. Matte, Allen J. Bartlett
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Patent number: 6022195Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: August 21, 1995Date of Patent: February 8, 2000Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Michael J. Eacobacci, Robert J. Lepofsky, David E. Roche, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein, Steven C. Rosner
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Patent number: 5906103Abstract: A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamber and surrounds the cryopanel to minimize the convective flow of gas past the cryopanel.Type: GrantFiled: March 16, 1998Date of Patent: May 25, 1999Assignee: Helix Technology CorporationInventor: Stephen R. Matte
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Patent number: 5901558Abstract: A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A gate valve is formed integrally with the fluid flow conduit for opening and closing the fluid flow path. A cryopumping array having an outer rim surrounding a central opening is positioned within the fluid conduit downstream from the gate valve and transverse to the fluid flow path such that the fluid flow path extends through the central opening. The outer rim captures water vapor from the fluid flow path.Type: GrantFiled: August 20, 1997Date of Patent: May 11, 1999Assignee: Helix Technology CorporationInventors: Stephen R. Matte, Alan L. Weeks
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Patent number: 5887438Abstract: A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A cryopumping array having an outer rim surrounding a central opening is positioned within the fluid conduit transverse to the fluid flow path such that the fluid flow path extends through the central opening of the array. The outer rim captures water vapor from the fluid flow path. The array has a transverse width and a rim width which are both greater than the thickness of the array. A conductive strut extends from the array through the fluid conduit transverse to the fluid flow path for a conductively coupling the array to a cryogenic cooling source which cools the array to cryogenic temperatures.Type: GrantFiled: August 20, 1997Date of Patent: March 30, 1999Assignee: Helix Technology CorporationInventors: Joseph P. Johnson, Stephen R. Matte, Doug F. Aitken, Mark Clemons
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Patent number: 5819545Abstract: The cryopanel of a cryopump can be preferentially defrosted to remove an acid-forming or toxic gas while leaving a second gas substantially condensed upon the cryopanel thereby limiting interaction between the vapor phases of the two gases. The cryopanel is warmed to a temperature within a selective defrost range at which the first gas selectively sublimates from the cryopanel. The temperature of the cryopanel is then maintained at a temperature within this range until the cryopanel is substantially cleared of the first gas leaving the second gas substantially undisturbed as a condensate upon the cryopanel. In a preferred embodiment, the cryopanel is maintained at about 50 to 85K during standard operation before being defrosted.Type: GrantFiled: November 25, 1997Date of Patent: October 13, 1998Assignee: Helix Technology CorporationInventors: Michael J. Eacobacci, Jr., Stephen R. Matte
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Patent number: 5799493Abstract: A cryopanel is formed of aluminum to avoid copper ions in a work chamber, and the aluminum is coated with a Teflon.RTM. polymer for corrosion resistance. A corrosion resistant thermally conductive link is obtained by surrounding indium with a polymer coated C-ring. The cryopanel is shaped as a trough to enable draining of liquid during regeneration.Type: GrantFiled: September 5, 1996Date of Patent: September 1, 1998Assignee: Helix Technology CorporationInventors: Ronald N. Morris, Doreen J. Ball-DiFazio, Stephen R. Matte, Ernest D. Quintanilha
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Patent number: 5727392Abstract: A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamber and surrounds the cryopanel to minimize the convective flow of gas past the cryopanel.Type: GrantFiled: December 19, 1996Date of Patent: March 17, 1998Assignee: Helix Technology CorporationInventor: Stephen R. Matte
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Patent number: 5537833Abstract: A cryogenic trap is shielded by a floating baffle array which is insulated from ambient temperature. The cryogenic trap includes a baffle array which is suspended by conductive braid from split cylinders. The split cylinders are cooled by respective closed cycle refrigerators.Type: GrantFiled: May 2, 1995Date of Patent: July 23, 1996Assignee: Helix Technology CorporationInventors: Stephen R. Matte, Bruce R. Andeen
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Patent number: 5483803Abstract: A cryogenically cooled water pump traps water vapor with a high probability but is open to non-condensing gases for high conductance to a turbomolecular pump. The preferred array is a single cylinder, having a length to diameter ratio of between 0.5 and 1, concentric with and near to an ambient temperature conduit. A center baffle, preferably of closed frustoconical shape, may be positioned at the center of the array over the upper bearing plate of the turbomolecular pump where it results in minimal reduction in conductance to the pump.Type: GrantFiled: October 28, 1994Date of Patent: January 16, 1996Assignee: Helix Technology CorporationInventors: Stephen R. Matte, Alan L. Weeks, Philip A. Lessard
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Patent number: 5443368Abstract: A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated.Type: GrantFiled: July 16, 1993Date of Patent: August 22, 1995Assignee: Helix Technology CorporationInventors: Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte', Peter W. Gaudet, Martin Stein, Steven C. Rosner, Robert J. Lepofsky