Patents by Inventor Stephen S. Baird

Stephen S. Baird has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacture of high precision electronic components with ultra-high purity liquids
    Patent number: 5242468
    Abstract: Semiconductor wafers and other electronic parts which similarly require ultra-high purity manufacturing environments are treated with ultra-high purity liquid cleaning and etching agents prepared at the site of use from gaseous raw materials which have been purified to a level compatible with semiconductor manufacturing standards, combined when appropriate with ultra-pure water.
    Type: Grant
    Filed: March 19, 1991
    Date of Patent: September 7, 1993
    Assignee: Startec Ventures, Inc.
    Inventors: R. Scot Clark, Stephen S. Baird, Joe G. Hoffman
  • Manufacture of high precision electronic components with ultra-high purity liquids
    Patent number: RE37972
    Abstract: Semiconductor wafers and other electronic parts which similarly require ultra-high purity manufacturing environments are treated with ultra-high purity liquid cleaning and etching agents prepared at the site of use from gaseous raw materials which have been purified to a level compatible with semiconductor manufacturing standards, combined when appropriate with ultra-pure water.
    Type: Grant
    Filed: June 2, 1999
    Date of Patent: February 4, 2003
    Assignee: American Air Liquide, Inc.
    Inventors: R. Scot Clark, Stephen S. Baird, Joe G. Hoffman
  • Manufacture of high precision electronic components with ultra-high purity liquids
    Patent number: RE36290
    Abstract: Semiconductor wafers and other electronic parts which similarly require ultra-high purity manufacturing environments are treated with ultra-high purity liquid cleaning and etching agents prepared at the site of use from gaseous raw materials which have been purified to a level compatible with semiconductor manufacturing standards, combined when appropriate with ultra-pure water.
    Type: Grant
    Filed: September 7, 1995
    Date of Patent: September 7, 1999
    Assignee: Air Liquide Electronics Chemicals & Services, Inc.
    Inventors: R. Scot Clark, Stephen S. Baird, Joe G. Hoffman