Patents by Inventor Stephen S. Roux

Stephen S. Roux has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patterning device support and lithographic apparatus
    Patent number: 9740112
    Abstract: A patterning device support (200), for example, a patterning device (202) or substrate support, can be configured to release internal stresses of a patterning device loaded thereon. The patterning device support can include a positive pressuring generating interface (206a, 206b) or an acoustic vibration generating interface (206a, 206b), or can be configured to oscillate while at least a portion of patterning device is decoupled from the patterning device support. A method of transferring a patterning device between a patterning device handling apparatus and a patterning device support configured to move the patterning device can include positioning the patterning device onto a surface of the patterning device support, and performing a process that releases internal stress of the patterning device.
    Type: Grant
    Filed: September 23, 2013
    Date of Patent: August 22, 2017
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Arindam Sinharoy, Stephen S. Roux, Jean-Philippe Xavier Van Damme, Daniel Nathan Burbank, Mark Josef Schuster, Duncan Harris, Christopher Charles Ward
  • Patterning Device Support and Lithographic Apparatus
    Publication number: 20150277240
    Abstract: A patterning device support (200), for example, a patterning device (202) or substrate support, can be configured to release internal stresses of a patterning device loaded thereon. The patterning device support can include a positive pressuring generating interface (206a, 206b) or an acoustic vibration generating interface (206a, 206b), or can be configured to oscillate while at least a portion of patterning device is decoupled from the patterning device support. A method of transferring a patterning device between a patterning device handling apparatus and a patterning device support configured to move the patterning device can include positioning the patterning device onto a surface of the patterning device support, and performing a process that releases internal stress of the patterning device.
    Type: Application
    Filed: September 23, 2013
    Publication date: October 1, 2015
    Applicants: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Arindam Sinharoy, Stephen S. Roux, Jean-Philippe Xavier Van Damme, Daniel Nathan Burbank, Mark Josef Schuster, Duncan Harris, Christopher Charles Ward