Abstract: A method and apparatus for cooling a semiconductor chamber are described herein. A semiconductor chamber component, includes a powered region, a grounded region, and a fluid conduit disposed within the semiconductor chamber component and passing through the powered region and grounded region, the fluid conduit comprising a ceramic material.

Abstract: A method and system for operating a facility having a plurality of equipment combinations wherein each equipment combination is operating interactively with at least one of another of the plurality of equipment combination is provided. The method includes receiving, in real-time, for each of the plurality of equipment combinations, a plurality of measured process parameters, determining at least one derived quantity from the plurality of measured process parameters, and recommending a change to an equipment operation based on the measured process parameters and the derived quantities.

Abstract: A computer program for scheduling of rosters of employees or contractors which program includes financial data so that actual value of sales on a unit of time basis for past periods, and the cost of wages incurred by reason of a selected schedule of personnel scheduled are provided. Also disclosed is the ability to test the cost of any schedule proposal in the future.

Abstract: A disposable cervical collar having an elongated unitary body formed from plastic core board or similar cellular material, the collar having a frontal section provided with a chin receiving opening, including a chin supporting flap and optionally a chin strap, with a throat opening underlying the chin opening, and a rear section which is slotted at spaced intervals for bending to conform to the wearer's neck, the rear section having a plastic strap adapted to be adhesively secured to the frontal section to secure the collar in place.

Abstract: A cervical collar composed essentially of an anterior section and a posterior section interconnected by an elongated strap, with the rear surfaces of the sections covered by cushioning material, the parts preferably being formed from high density polyethylene sheeting with polyethylene foam cushioning material, the parts being interconnected by plastic fasteners. Preferably the sections will be adjustable relative to each other, with one of the sections slidably mounted relative to the other. The configuration of the sections is designed to provided optimum support to achieve immobilization of the cervical spine.