Patents by Inventor Stephen Vargo

Stephen Vargo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of enhancing an etch system
    Patent number: 7838322
    Abstract: Systems and techniques for enhanced etch processes. For example, a substrate may be received in an etch chamber, where the substrate comprises a handle layer, a bonding layer in communication with the handle layer, and a device layer in communication with the bonding layer. The device layer may comprise a device layer patterned therein and having a bottom surface, where the bottom surface of the device is attached to the bonding layer. The bonding layer may comprise an oxide annealed at relatively low temperature. A dry etch process may be performed to release the bottom surface of the device from the bonding layer.
    Type: Grant
    Filed: February 28, 2006
    Date of Patent: November 23, 2010
    Assignee: Tessera MEMS Technologies, Inc.
    Inventors: Stephen Vargo, Roman C. Gutierrez