Patents by Inventor Stephen Voss

Stephen Voss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for improved control of process and purge material in substrate processing system
    Patent number: 6179925
    Abstract: A method and apparatus for control of precursor and purge additive materials in a deposition system comprising a precursor material delivery system and a plurality of purge additive transfer lines connected between or at components in the precursor material delivery system. One of the plurality of purge additive transfer lines is connected between an ampoule and a liquid mass flow controller, another is connected between the liquid mass flow controller and a vaporizer and a third is connected to the vaporizer. The apparatus further comprises a process chamber connected to the precursor material delivery system and having a susceptor wherein one of the plurality of purge additive transfer lines is connected to the susceptor. With the apparatus and accompanying method, formation of particulate contaminants is greatly reduced.
    Type: Grant
    Filed: May 14, 1999
    Date of Patent: January 30, 2001
    Assignee: Applied Materials, Inc.
    Inventors: John Schmitt, Bo Zheng, Mei Chang, Stephen Voss