Patents by Inventor Stephen W. Goodrich

Stephen W. Goodrich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7716009
    Abstract: A method of preparing recipes of operating a metrology tool, wherein each recipe includes a set of instructions for measuring at least one dimension in a microelectronic feature. There is provided a desired recipe having instructions for measuring one or more desired dimensions, the desired recipe or portion thereof including a summary of parameters relating to metrology tool function with respect to the microelectronic feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in a database, identifying differences between the instructions in the desired recipe and the instructions in the database, modifying the instructions in the desired recipe to conform to the instructions in the database, verifying the desired recipe prior to using the modified desired recipe by the metrology tool, and using the desired recipe to execute a microelectronic feature measurement on the metrology tool.
    Type: Grant
    Filed: November 8, 2007
    Date of Patent: May 11, 2010
    Assignee: International Business Machines Corporation
    Inventors: Ejaj Ahmed, Charles N. Archie, Stephen W. Goodrich, Eric P. Solecky, Georgios A. Vakas, Erwin E. Weissmann, Lin Zhou
  • Patent number: 7535349
    Abstract: A method, system and computer program product for controlling a processing system are disclosed. Alarms and information regarding operating components within the processing system are collected by a knowledge base and are related to one another therein. Data in the knowledge base is then analyzed to determine a root cause for the alarms.
    Type: Grant
    Filed: December 8, 2006
    Date of Patent: May 19, 2009
    Assignee: International Business Machines Corporation
    Inventors: Dmitriy Shneyder, Stephen W. Goodrich, Joseph J. Mezzapelle, Lin Zhou
  • Publication number: 20080140225
    Abstract: A method, system and computer program product for controlling a processing system are disclosed. Alarms and information regarding operating components within the processing system are collected by a knowledge base and are related to one another therein. Data in the knowledge base is then analyzed to determine a root cause for the alarms.
    Type: Application
    Filed: December 8, 2006
    Publication date: June 12, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dmitriy Shneyder, Stephen W. Goodrich, Joseph J. Mezzapelle, Lin Zhou
  • Patent number: 7305320
    Abstract: A method of preparing recipes for operating a metrology tool, each recipe including a set of instructions for measuring dimensions in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different feature dimensions by creating a summary of a recipes used by the tool, and adding categorization attributes to identify the summary for retrieval from the database. There is provided a desired recipe having instructions for measuring desired dimensions, including a summary of parameters relating to tool function for the feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences therebetween, modifying the desired recipe instructions to conform to the database instructions, verifying the desired recipe prior to using the modified desired recipe by the tool, and using the desired recipe to execute a feature measurement on the tool.
    Type: Grant
    Filed: February 15, 2006
    Date of Patent: December 4, 2007
    Assignee: International Business Machines Corporation
    Inventors: Ejaj Ahmed, Charles N. Archie, Stephen W. Goodrich, Eric P. Solecky, Georgios A. Vakas, Erwin E. Weissmann, Lin Zhou