Abstract: Various examples include a substrate pre-aligner system that can align substrates by detecting a fiducial on the substrate, determine an amount of bow in the substrate, and determine other characteristics of the substrate. In one example, by imaging both a 0-degree orientation and after a single 180-degree rotation of the substrate, the pre-aligner of the disclosed subject-matter can determine, for example, a location of the fiducial and bow in the substrate. In other embodiments, multiple cameras are used to capture images of the substrate substantially simultaneously and determine, for example, a location of the fiducial and bow in the substrate. The multiple camera embodiment can also allow a higher throughput of substrates as compared with the 0-degree to 180-degree embodiment. Other systems and methods are also disclosed.

Abstract: Various examples include a system and network to map of substrates within a substrate carrier (e.g., such as silicon wafers within a wafer cassette), and a classification of a state of each substrate, as well as the carrier in which the substrates are placed. In various examples provided herein, an image acquisition system, such as a camera, acquires multiple images of the substrates within the carrier. The image or images are then processed with a deep-convolutional neural-network to classify a state of the substrate relative to a substrate slot including empty slots, occupied slots (e.g., properly loaded slots), double-loaded slots, cross-slotted, and protruded (where a substrate is not fully loaded into a slot).

Abstract: A method and apparatus for EMI shielding of an electronic package is described. The method includes applying a patterned package support to a transport tray, and placing one or more electronic packages in aligned contact with one or more open features of the patterned package support such that a peripheral region of the electronic package contacts an upper surface of the patterned package support and a central region overhangs the open feature. The method further includes depositing one or more metal layers onto the one or more electronic packages and patterned package support, wherein the open features in the patterned package support allow metal layer deposition on the sidewalls of the one or more electronic packages and protect at least a portion of the underside of the one or more electronic packages.

Abstract: A processing device includes a plurality of walls defining an interior space configured to be exposed to plasma and a surface coating on the interior surface of at least one of the plurality of walls. The surface coating includes pores forming interconnected porosity. The processing device further includes a sealant residing in at least a portion of the pores of the surface coating. In an embodiment, the sealant can be a thermally cured sealant having a cure temperature not greater than about 100° C. In another embodiment, the sealant can be an epoxy sealant having a viscosity of not greater than 500 cP in liquid precursor form. In yet another embodiment, the sealant can be a low shrinkage sealant characterized by a solidification shrinkage of not greater than 8%.

Abstract: An electrostatic chuck includes an insulating layer, a conductive layer overlying the insulating layer, a dielectric layer overlying the conductive layer, the dielectric layer having pores forming interconnected porosity, and a cured polymer infiltrant residing in the pores of the dielectric layer.

Abstract: Noise in digitized image data is reduced by providing an array of pixels for each of which a gray level has been determined. For each column of the array, a distribution of gray levels is derived, and a range of acceptable gray levels is set based on the distribution. For pixels with a gray level outside the range, the gray level is changed to reduce the influence of noise in the imaged data.

Abstract: A control system for controlling the speed of a boat of the type including a motor having a throttle control lever coupled to a throttle of the motor provides for stable and predictable control of the speed of a boat The control system includes a position detector configured to detect the position of the throttle control lever and to generate a first signal representative of a target speed of the motor; a sensor which generates a second signal representative of the actual speed of the motor; an actuator adapted to control the throttle; and a servo controller, which in response to the first signal and the second signal, generates an output to adjust the position of the actuator.

Abstract: A control system for controlling the speed of a boat of the type including a motor having a throttle control lever coupled to a throttle of the motor provides for stable and predictable control of the speed of a boat The control system includes a position detector configured to detect the position of the throttle control lever and to generate a first signal representative of a target speed of the motor; a sensor which generates a second signal representative of the actual speed of the motor; an actuator adapted to control the throttle; and a servo controller, which in response to the first signal and the second signal, generates an output to adjust the position of the actuator.

Abstract: A magnetic lens focuses a charged particle beam generated by an instrument to a very small spot for deriving characteristics of a sample. A magnetic flux pattern is created which provides improved high resolution. The lens includes a polepiece with an inner yoke, an outer yoke and a winding. A lens outer pole is secured to the outer yoke and includes a first surface having a first opening defined therein positioned such that the beam passes therethrough. A lens inner pole is secured to the inner yoke and includes a second surface having a second opening defined therein aligned with the first opening, but with a smaller inner diameter.

Abstract: Noise in digitized image data is reduced by providing an array of pixels for each of which a gray level has been determined. For each column of the array, a distribution of gray levels is derived, and a range of acceptable gray levels is set based on the distribution. For pixels with a gray level outside the range, the gray level is changed to reduce the influence of noise in the imaged data.

Abstract: The shape of a sample is determined with a scanning electron microscope ("SEM") by using electron emission from a surface to measure its slope. A surface of a sample is placed in the SEM's electron beam for several known angles, and respective measurements of the electron emission are obtained. A relationship between surface angle and electron emission is derived for the sample from the measurements. Then, as the electron beam is scanned along the surface to measure electron emission, this derived relationship is used to obtain the slope at each scanning point.

Abstract: Method and apparatus for measuring displacement between layers of a semiconductor wafer wherein systematic errors associated with the measurement system are eliminated. An optical system, including a microscope and a camera, records an image of registration patterns on different layers of the wafer. The image is analyzed to measure displacement between the registration patterns. A first measurement is taken, the wafer is rotated by 180.degree. about the measurement axis, and a second measurement is taken. The actual displacement between layers of the semiconductor wafer is calculated from the first and second measurements. Since the measured displacements change sign when the wafer is rotated and the systematic errors remain constant, systematic errors drop out of the calculated values of actual displacement. System errors can also be calculated for subsequent correction of measured values.