Abstract: A source magnet assembly for an ion source system of an ion implantation system. The source magnet assembly includes source magnetic poles that are operationally movable with respect to an arc chamber of the ion source system. In one example, the magnetic field produced by the source magnet is positionable in a two dimensional area. In another example, the magnetic field can be rotated. Some source magnet assemblies include plates that are slidable with respect to one another. The magnetic core is moved by moving the plates with respect to each other by a motorized force. With some assemblies, structures of the assembly are rotatable with respect to one another so that the core may be rotated around the arc chamber.

Abstract: An improved ion source is provided with multiple filaments and wiring for selectively connecting various combinations of filaments to a current source. In one embodiment an additional filament is a spare filament which is connected to the current source when the primary filament burns out. This decreases down time due to filament replacement. In another embodiment, an additional filament operates simultaneously with a primary filament to provide a more homogenous electron cloud and to increase filament life.

Abstract: An improved ion source is provided with multiple filaments and wiring for selectively connecting various combinations of filaments to a current source. In one embodiment an additional filament is a spare filament which is connected to the current source when the primary filament burns out. This decreases down time due to filament replacement. In another embodiment, an additional filament operates simultaneously with a primary filament to provide a more homogenous electron cloud and to increase filament life.

Abstract: A leak and liquid level detector includes a transistor as its main operating element with a pair of normally open base contacts connected to the transistor base. The transistor emitter is connected to ground and the transistor collector is connected to a suitable audio alarm, or alarm light or to a programmable logic controller. When a liquid leak bridges over the base contacts, a power circuit is closed across the contacts biasing the transistor and causing an electrical signal to flow from the collector to actuate the alarm, light or controller. The base contacts are linearly adjustable to sense various leak heights. The detector in one mode of use can be positioned horizontally to detect leaks and in a second mode of use is positioned vertically to detect a change in a liquid level in a tank, pipe column or the like.