Abstract: A method for detecting an anomaly on a top surface of a substrate comprises directing a first radiation beam having a first wavelength at the top surface of the substrate at a first angle measured from normal, and directing a second radiation beam having a second wavelength at the top surface of the substrate at a second angle measured from normal, wherein the second wavelength is not equal to the first wavelength. The method then comprises detecting scattered radiation from the first radiation beam and the second radiation beam to detect the presence of particles or COPs, and to differentiate between the two. Differences in the scattered radiation detected from the first radiation beam and from the second radiation beam provide the data needed to differentiate between particles and COPs.

Abstract: A method for detecting an anomaly on a top surface of a substrate comprises directing a first radiation beam having a first wavelength at the top surface of the substrate at a first angle measured from normal, and directing a second radiation beam having a second wavelength at the top surface of the substrate at a second angle measured from normal, wherein the second wavelength is not equal to the first wavelength. The method then comprises detecting scattered radiation from the first radiation beam and the second radiation beam to detect the presence of particles or COPs, and to differentiate between the two. Differences in the scattered radiation detected from the first radiation beam and from the second radiation beam provide the data needed to differentiate between particles and COPs.

Abstract: A method for detecting an anomaly on a top surface of a substrate comprises directing a first radiation beam having a first wavelength at the top surface of the substrate at a first angle measured from normal, and directing a second radiation beam having a second wavelength at the top surface of the substrate at a second angle measured from normal, wherein the second wavelength is not equal to the first wavelength. The method then comprises detecting scattered radiation from the first radiation beam and the second radiation beam to detect the presence of particles or COPs, and to differentiate between the two. Differences in the scattered radiation detected from the first radiation beam and from the second radiation beam provide the data needed to differentiate between particles and COPs.

Abstract: A method for detecting an anomaly on a first surface of a transparent substrate starts with providing a transparent substrate that has a reflective second surface. The method then comprises directing a radiation beam at the first surface of the substrate so that at least a portion of the radiation penetrates the substrate and strikes the reflective second surface. This radiation is reflected back as a reflected radiation beam through the first surface of the substrate. The method then comprises detecting radiation from the reflected radiation beam. This method can further comprise causing relative motion between the radiation beam and the first surface of the substrate. This method can also further comprise documenting the presence of an anomaly if the detected radiation shows that the reflected radiation beam was scattered upon traversing the first surface.

Abstract: A method for detecting an anomaly on a first surface of a transparent substrate starts with providing a transparent substrate that has a reflective second surface. The method then comprises directing a radiation beam at the first surface of the substrate so that at least a portion of the radiation penetrates the substrate and strikes the reflective second surface. This radiation is reflected back as a reflected radiation beam through the first surface of the substrate. The method then comprises detecting radiation from the reflected radiation beam. This method can further comprise causing relative motion between the radiation beam and the first surface of the substrate. This method can also further comprise documenting the presence of an anomaly if the detected radiation shows that the reflected radiation beam was scattered upon traversing the first surface.

Abstract: A method for detecting an anomaly on a top surface of a substrate comprises directing a first radiation beam having a first wavelength at the top surface of the substrate at a first angle measured from normal, and directing a second radiation beam having a second wavelength at the top surface of the substrate at a second angle measured from normal, wherein the second wavelength is not equal to the first wavelength. The method then comprises detecting scattered radiation from the first radiation beam and the second radiation beam to detect the presence of particles or COPs, and to differentiate between the two. Differences in the scattered radiation detected from the first radiation beam and from the second radiation beam provide the data needed to differentiate between particles and COPs.