Patents by Inventor Steve Brainerd

Steve Brainerd has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating a phase-shifting semiconductor photomask
    Patent number: 5942355
    Abstract: A photomask is disclosed in which buffer regions are created in between areas of phase transitions to prevent the formation of null intensity areas on semiconductor wafers fabricated using the photomask of the present embodiment. The buffer regions are first patterned with opaque regions, which act as etch masks for adjoining phase-shifting layers. Then the opaque regions are removed, and the buffer regions may be etched to create buffer regions of varying phase angles.
    Type: Grant
    Filed: September 4, 1996
    Date of Patent: August 24, 1999
    Assignee: Micron Technology, Inc.
    Inventors: Steve Brainerd, J. Brett Rolfson