Abstract: The present invention generally relates to an injector for a semiconductor fabrication tool for dispensing a material into an interior volume of the fabrication tool during a fabrication process of a semiconductor wafer. The injector may have a micrometer that may be adjusted so as to totally stop the flow of material through the injector or the micrometer may be adjusted to allow a range of precisely controlled flow rates of material through the injection. The injector is also preferably able to be easily taken apart and cleaned in the field, thereby increasing the injectors useful lifetime.

Abstract: An exhaust conduit having a wall with an inner surface that at least partially defines a flow channel, a first fin positioned within the flow channel and attached to the inner surface, a second fin positioned within the flow channel and attached to the inner surface such that the first fin is spaced apart from the second fin. A support strip is attached to the inner surface, attached to the first fin at a first location spaced apart from the inner surface, and attached to the second fin at a second location spaced apart from the inner surface.

Abstract: An exhaust conduit having a wall with an inner surface that at least partially defines a flow channel, a first fin positioned within the flow channel and attached to the inner surface, a second fin positioned within the flow channel and attached to the inner surface such that the first fin is spaced apart from the second fin. A support strip is attached to the inner surface, attached to the first fin at a first location spaced apart from the inner surface, and attached to the second fin at a second location spaced apart from the inner surface.