Patents by Inventor Steve Cui

Steve Cui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9645093
    Abstract: An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: May 9, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk, Steve Short, Mikhail Haurylau, Qiang Q. Zhang, Grace Hsiu-Ling Chen, Robert M. Danen, Suwipin Martono, Shobhit Verma, Wenjian Cai, Meier Brender
  • Publication number: 20160054232
    Abstract: An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.
    Type: Application
    Filed: November 2, 2015
    Publication date: February 25, 2016
    Inventors: Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk, Steve Short, Mikhail Haurylau, Qiang Q. Zhang, Grace Hsiu-Ling Chen, Robert M. Danen, Suwipin Martono, Shobhit Verma, Wenjian Cai, Meier Brender
  • Patent number: 9176069
    Abstract: An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.
    Type: Grant
    Filed: February 6, 2013
    Date of Patent: November 3, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk, Steve Short, Mikhail Haurylau, Qiang Q. Zhang, Grace Hsiu-Ling Chen, Robert M. Danen, Suwipin Martono, Shobhit Verma, Wenjian Cai, Meier Brender
  • Patent number: 8902429
    Abstract: The disclosure is directed to focusing one or more detectors of an interferometry system. An initial focus position may be determined by focusing a detector on an edge of a sample by comparing image contrast of intensity frames collected by the detector. Data associated with an inner edge of a ring formed by the image of the sample reflected on a reference flat may be collected from one or more positions near the initial focus position. The detector can be focused to a selected position by comparing edge data collected at the various detector positions near the initial focus position.
    Type: Grant
    Filed: December 5, 2012
    Date of Patent: December 2, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Jie-Fei Zheng, Steve Cui
  • Patent number: 8621945
    Abstract: Disclosed herein is a method and system for providing environmental control for a vibration sensitive system such as an interferometric measurement system, while minimizing acoustic noise during data acquisition.
    Type: Grant
    Filed: April 4, 2011
    Date of Patent: January 7, 2014
    Assignee: KLA Tencor
    Inventors: An Andrew Zeng, Shouhong Tang, Steve Cui
  • Publication number: 20120118061
    Abstract: Disclosed herein is a method and system for providing environmental control for a vibration sensitive system such as an interferometric measurement system, while minimizing acoustic noise during data acquisition.
    Type: Application
    Filed: April 4, 2011
    Publication date: May 17, 2012
    Inventors: An Andrew Zeng, Shouhong Tang, Steve Cui
  • Publication number: 20060274304
    Abstract: Systems and methods for inspecting an edge of a specimen are provided. One system includes an illumination subsystem configured to direct light to the edge of the specimen at an oblique angle of incidence. The plane of incidence of the light is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The system also includes a detection subsystem configured to collect light scattered from the edge and to generate signals responsive to the scattered light. One method includes directing light to the edge of the specimen at an oblique angle of incidence. The plane of incidence is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The method also includes collecting light scattered from the edge and generating signals responsive to the scattered light. The signals described above can be used to detect defects on the edge of the specimen.
    Type: Application
    Filed: June 6, 2005
    Publication date: December 7, 2006
    Inventors: Kurt Haller, Steve Cui, Jared Lera
  • Patent number: 6194016
    Abstract: The present invention provides for optimal extraction conditions for extracting yellow mustard gum from yellow mustard bran to provide for high yield. The four variables examined were extraction temperature, pH, water:solid ratio and extraction time. Of these variables, temperature and pH had a much greater influence on the yield and rheological properties of the extracted gum compared to water/solid ratio and extraction time. Optimum extraction conditions were temperatures between 50-70° C., pH 7-10, water/solid ratio of 40:1-60:1 and extraction time of 2-2.5 hr. The yield of gum obtained under the optimum extraction conditions was 30% of bran weight. The extracted gum exhibited maximum shear thinning flow behaviours. It can be incorporated into cosmetic products and skin lotions.
    Type: Grant
    Filed: April 28, 2000
    Date of Patent: February 27, 2001
    Inventors: Wuwei (Steve) Cui, N. A. Michael Eskin, Nam Fong Han, Zhi Zhong Duan, Xiao Ying Zhang