Patents by Inventor Steve Ellinger

Steve Ellinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion energy attenuation method by determining the required number of ion collisions
    Patent number: 6013984
    Abstract: A method and an apparatus for controlling the location where the formation of a contamination layer occurs in a plasma processing system is disclosed. The control is accomplished by reducing the released ion's kinetic energy to approximately at most the surface potential of the selected surface to which it is to combine within the desired location.
    Type: Grant
    Filed: June 10, 1998
    Date of Patent: January 11, 2000
    Assignee: Lam Research Corporation
    Inventors: Steve Ellinger, Joseph Fernandez