Patents by Inventor Steve Gentile

Steve Gentile has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Single-chamber sequential curing of semiconductor wafers
    Patent number: 8951348
    Abstract: The present invention relates to curing of semiconductor wafers. More particularly, the invention relates to cure chambers containing multiple cure stations, each featuring one or more UV light sources. The wafers are cured by sequential exposure to the light sources in each station. In some embodiments, the wafers remain stationary with respect to the light source during exposure. In other embodiments, there is relative movement between the light source and the wafer during exposure. The invention also provides chambers that may be used to independently modulate the cross-linking, density and increase in stress of a cured material by providing independent control of the wafer temperature and UV intensity.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: February 10, 2015
    Assignee: Novellus Systems, Inc.
    Inventors: Krishnan Shrinivasan, Feng Wang, George Kamian, Steve Gentile, Mark Yam
  • Single-chamber sequential curing of semiconductor wafers
    Patent number: 8137465
    Abstract: The present invention relates to curing of semiconductor wafers. More particularly, the invention relates to cure chambers containing multiple cure stations, each featuring one or more UV light sources. The wafers are cured by sequential exposure to the light sources in each station. In some embodiments, the wafers remain stationary with respect to the light source during exposure. In other embodiments, there is relative movement between the light source and the wafer during exposure. The invention also provides chambers that may be used to independently modulate the cross-linking, density and increase in stress of a cured material by providing independent control of the wafer temperature and UV intensity.
    Type: Grant
    Filed: April 26, 2005
    Date of Patent: March 20, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Krishna Shrinivasan, Feng Wang, George Kamian, Steve Gentile, Mark Yam