Patents by Inventor Steve Graca

Steve Graca has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optimizing focal plane fitting functions for an image field on a substrate
    Publication number: 20060193532
    Abstract: A sample for generating feedback for adjusting focal plane fitting values of an exposure tool by product shot comprises a product wafer, an opaque material layer adjacent the product wafer, and a blazed phase grating patterned layer adjacent the opaque material layer.
    Type: Application
    Filed: May 4, 2005
    Publication date: August 31, 2006
    Inventors: William Roberts, Steve Graca