Patents by Inventor Steve K. Grumbine

Steve K. Grumbine has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Boron-containing polishing system and method
    Publication number: 20040180612
    Abstract: The invention provides a chemical-mechanical polishing system comprising an abrasive, a carrier, and either boric acid, or a conjugate base thereof, wherein the boric acid and conjugate base are not present together in the polishing system in a sufficient amount to act as a pH buffer, or a water-soluble boron-containing compound, or salt thereof, that is not boric acid, and a method of polishing a substrate using the chemical-mechanical polishing system.
    Type: Application
    Filed: March 16, 2004
    Publication date: September 16, 2004
    Applicant: Cabot Microelectronics Corporation
    Inventors: Renjie Zhou, Steve K. Grumbine, Isaac K. Cherian