Patents by Inventor Steve Kirtley

Steve Kirtley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stacked pad and method of use
    Publication number: 20070087177
    Abstract: The following is a description of a stacked pad 15 for chemical mechanical polishing and/or planarizing substrates. In one embodiment, the stacked pad includes a top pad 20 and a subpad 40 where the modulus of the top pad 20 substantially equals the modulus of the subpad 40. Also presented are methods of using the stacked pad 15 which include methods of chemical mechanical polishing and/or planarization, and products of using the stacked pad.
    Type: Application
    Filed: October 12, 2004
    Publication date: April 19, 2007
    Inventors: Guangwei Wu, Steve Kirtley, Thomas West