Patents by Inventor Steve Lakeman

Steve Lakeman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • A SYSTEM AND METHOD FOR MASS FLOW MEASUREMENT AND CONTROL OF PROCESS GASES IN A CARRIER STREAM USING ONE OR MORE QUARTZ CRYSTAL MICROBALANCE SENSORS
    Publication number: 20240263313
    Abstract: A method for monitoring precursor material in a carrier stream of a fabrication system comprises depositing a film of precursor material on a surface of a QCM sensor and determining a starting resonance frequency of the QCM sensor with the deposited film of precursor material. The resonance frequency of the QCM sensor is measured during operation of the fabrication system and compared with the starting resonance frequency. A system error is issued when the measured resonance frequency differs from the corresponding starting resonance frequency by more than a threshold value. A system correction is automatically implemented and configured to restore the QCM sensor to the starting resonance frequency.
    Type: Application
    Filed: June 2, 2022
    Publication date: August 8, 2024
    Applicant: INFICON, Inc.
    Inventors: Steve Lakeman, Mohamed Rinzan, Chunhua Song, Lukas Baumgartel