Patents by Inventor Steve Oestreich

Steve Oestreich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for void characterization
    Patent number: 6801596
    Abstract: The present invention provides a system for characterizing voids in test samples. An x-ray emission inducer scans a target such as a via on a test sample. A metallization or thin film layer emits x-rays as a result of the scan. The x-ray emission intensity can be measured and compared against a control measurement. The information obtained can be used to characterize a void in the scan target.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: October 5, 2004
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Mehran Nasser-Ghodsi, Anne Testoni, Steve Oestreich