Abstract: An apparatus, system, and method for measuring parameters, measuring or determining capacitance, producing a digital output that is dependent upon a capacitance, or converting a variable capacitance output, of a sensor capacitor for example, into a digital format. By activating and deactivating pins, a microprocessor may form various circuits, for instance, each containing a resistor and a different capacitor and, in some embodiments, without the use of intermediate switching components. The microprocessor may alternately measure the time to change the charge of each of the capacitors and then calculate the capacitance of one of the capacitors using the measured times and known capacitances of one or more reference capacitors. Certain embodiments use two reference capacitors and alternately charge and discharge the capacitors, and a simple formula may be used to calculate capacitance using times to reach a threshold voltage. A measured parameter may be humidity or pressure, for example.

Abstract: Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating a common top plate and first and second bottom plates associated with a first and second capacitor, Cx1 and Cx2. For proper operation, the common top plate should be in capacitive balance. Capacitive balance can be achieved by creating voids within and/or along the common top plate of the sensor. A system for creating voids can include a precision cutting instrument, a measuring device for enabling the measurement of capacitance of at least one of the common series capacitive circuit, Cx1 and Cx2, and power provided from a voltage source.

Abstract: Methods of and systems providing high reliability relative humidity sensors having integrated signal conditioning are described, providing a series capacitive circuit including a humidity-sensitive dielectric, a common top plate and first and second bottom plates associated with a first and second capacitor, respectively. Changes in humidity affect the humidity-sensitive dielectric thereby causing changes in the capacitive value of said series capacitive circuit.

Abstract: Methods of and systems providing high reliability relative humidity sensors having integrated signal conditioning are described, providing a series capacitive circuit including a humidity-sensitive dielectric, a common top plate and first and second bottom plates associated with a first and second capacitor, respectively. Changes in humidity affect the humidity-sensitive dielectric thereby causing changes in the capacitive value of said series capacitive circuit.

Abstract: Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating a common top plate and first and second bottom plates associated with a first and second capacitor, Cx1 and Cx2. For proper operation, the common top plate should be in capacitive balance. Capacitive balance can be achieved by creating voids within and/or along the common top plate of the sensor. A system for creating voids can include a precision cutting instrument, a measuring device for enabling the measurement of capacitance of at least one of the common series capacitive circuit, Cx1 and Cx2, and power provided from a voltage source.

Abstract: A temperature sensor is made with a rigid substrate disposed within a metallic tube for the purpose of supporting a resistive temperature detector and conductive strips disposed on the substrate. The conductive strips of palladium silver are deposited on the substrate and in electrical communication with gold pads that are used to permit the RTD to be connected to the gold pads by wire bonding techniques. A sleeve is provided at an opposite end of the sensor to support a first end region of the rigid substrate at a preselected position within the tube. The second end region of the substrate extends away from the sleeve and toward an opposite end of the tube, which is crimped to seal it. Conductive wires are avoided within the main portion of the outer metallic tube, thus eliminating the need for fiber glass sleeved wires extending through the tube.