Patents by Inventor Steve Reyling

Steve Reyling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for using a robot to remove a substrate carrier door
    Patent number: 6520726
    Abstract: A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the chamber. A drive mechanism is connected to the robot. A door interface mechanism is attached to the drive mechanism and includes a door key and a door key control assembly. The drive mechanism provides mechanical control of the door key control assembly such that that door key is manipulated to couple a substrate carrier door to a port door. The coupled doors are storable within the chamber or on the robot. The drive mechanism may also include a substrate end effector, thereby allowing the robot to transport substrates within the chamber. The robot is movable within the chamber to multiple processing stations.
    Type: Grant
    Filed: March 2, 2000
    Date of Patent: February 18, 2003
    Assignee: PRI Automation, Inc.
    Inventors: Gregory Cook, Craig Chidlow, Rodney Ow, Lang Van Nugyen, J. Rafael Gomez, Steve Reyling, Martin P. Aalund, Steven J. Remis