Patents by Inventor Steve S. Muira

Steve S. Muira has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Crosslinkable aqueous developable photoresist compositions and method for use thereof
    Patent number: 5296332
    Abstract: High sensitivity, high contrast, heat-stable resist compositions for use in deep UV, i-line e-beam and x-ray lithography. These compositions comprise a film-forming polymer having aromatic rings activated for electrophilic substitution, an acid catalyzable crosslinking agent which forms a hydroxy-stabilized carbonium ion, and a photoacid generator. The compositions are aqueous base developable.
    Type: Grant
    Filed: November 22, 1991
    Date of Patent: March 22, 1994
    Assignee: International Business Machines Corporation
    Inventors: Harbans S. Sachdev, Willard E. Conley, Premlatha Jagannathan, Ahmad D. Katnani, Ranee W. Kwong, Leo L. Linehan, Steve S. Muira, Randolph J. Smith