Patents by Inventor Steve Sansoni

Steve Sansoni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR SPUTTER ETCH CONDITIONING A CERAMIC BODY
    Publication number: 20010040091
    Abstract: A method and apparatus for conditioning a surface of a ceramic body in a process chamber when the process chamber has a vacuum pump, an anode and a cathode. The conditioning method consists of pumping the process chamber down to a vacuum with the vacuum pump, introducing a gas into the chamber, energizing the anode and cathode with RF power to ignite the gas into a plasma, sputter etching the surface with ions from the plasma to remove contaminants therefrom. The method is accomplished either within a process chamber to condition, in situ, a ceramic chuck or within a cleaning chamber to condition any form of ceramic body or component.
    Type: Application
    Filed: September 23, 1998
    Publication date: November 15, 2001
    Inventors: NITIN KHURANA, VINCE BURKHART, STEVE SANSONI, VIJAY PARKHE, EUGENE TZOU
  • Method and apparatus for sputter etch conditioning a ceramic body
    Patent number: 5861086
    Abstract: A method and apparatus for conditioning a surface of a ceramic body in a process chamber when the process chamber has a vacuum pump, an anode and a cathode. The conditioning method consists of pumping the process chamber down to a vacuum with the vacuum pump, introducing a gas into the chamber, energizing the anode and cathode with RF power to ignite the gas into a plasma, sputter etching the surface with ions from the plasma to remove contaminants therefrom. The method is accomplished either within a process chamber to condition, in situ, a ceramic chuck or within a cleaning chamber to condition any form of ceramic body or component.
    Type: Grant
    Filed: March 10, 1997
    Date of Patent: January 19, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Nitin Khurana, Vince Burkhart, Steve Sansoni, Vijay Parkhe, Eugene Tzou