Patents by Inventor Steve Tsu

Steve Tsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for process abatement
    Publication number: 20070086931
    Abstract: In a first aspect, a first abatement apparatus is provided. The first abatement apparatus includes (1) an oxidation unit adapted to receive an effluent stream from a semiconductor device manufacturing chamber; (2) a first water scrubber unit adapted to receive the effluent stream from the oxidation unit; and (3) a catalysis unit adapted to receive the effluent stream from the first water scrubber unit. Numerous other aspects are provided.
    Type: Application
    Filed: June 13, 2006
    Publication date: April 19, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Sebastien Raoux, Brian Kingston, Mark Curry, Daniel Clark, Robbert Vermeulen, Belynda Flippo, Mark Holst, Steve Tsu, Kevin Lin, Monique Mcintosh