Abstract: A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.

Abstract: A fact extraction tool set (“FEX”) finds and extracts targeted pieces of information from text using linguistic and pattern matching technologies, and in particular, text annotation and fact extraction. Text annotation tools break a text, such as a document, into its base tokens and annotate those tokens or patterns of tokens with orthographic, syntactic, semantic, pragmatic and other attributes. A user-defined “Annotation Configuration” controls which annotation tools are used in a given application. XML is used as the basis for representing the annotated text. A tag uncrossing tool resolves conflicting (crossed) annotation boundaries in an annotated text to produce well-formed XML from the results of the individual annotators. The fact extraction tool is a pattern matching language which is used to write scripts that find and match patterns of attributes that correspond to targeted pieces of information in the text, and extract that information.

Abstract: A fact extraction tool set (“FEX”) finds and extracts targeted pieces of information from text using linguistic and pattern matching technologies, and in particular, text annotation and fact extraction. Text annotation tools break a text, such as a document, into its base tokens and annotate those tokens or patterns of tokens with orthographic, syntactic, semantic, pragmatic and other attributes. A user-defined “Annotation Configuration” controls which annotation tools are used in a given application. XML is used as the basis for representing the annotated text. A tag uncrossing tool resolves conflicting (crossed) annotation boundaries in an annotated text to produce well-formed XML from the results of the individual annotators. The fact extraction tool is a pattern matching language which is used to write scripts that find and match patterns of attributes that correspond to targeted pieces of information in the text, and extract that information.

Abstract: A fact extraction tool set (“FEX”) finds and extracts targeted pieces of information from text using linguistic and pattern matching technologies, and in particular, text annotation and fact extraction. Text annotation tools break a text, such as a document, into its base tokens and annotate those tokens or patterns of tokens with orthographic, syntactic, semantic, pragmatic and other attributes. A user-defined “Annotation Configuration” controls which annotation tools are used in a given application. XML is used as the basis for representing the annotated text. A tag uncrossing tool resolves conflicting (crossed) annotation boundaries in an annotated text to produce well-formed XML from the results of the individual annotators. The fact extraction tool is a pattern matching language which is used to write scripts that find and match patterns of attributes that correspond to targeted pieces of information in the text, and extract that information.

Abstract: A method and apparatus for providing a computer system having a plurality of logical partitions with a virtual operator panel is disclosed. The method and apparatus include displaying a plurality of operator panels on a single console corresponding to each of the logical partitions, and providing a buffer for each logical partition. The status codes from each of the logical partitions are then written directly to the corresponding buffer. To display the status codes of one of the logical partitions, the status code from the buffer corresponding the logical partition is read and sent to the corresponding operator panel for display.

Abstract: A method and apparatus for providing a computer system having a plurality of logical partitions with a virtual operator panel is disclosed. The method and apparatus include displaying a plurality of operator panels on a single console corresponding to each of the logical partitions, and providing a buffer for each logical partition. The status codes from each of the logical partitions are then written directly to the corresponding buffer. To display the status codes of one of the logical partitions, the status code from the buffer corresponding the logical partition is read and sent to the corresponding operator panel for display.