Patents by Inventor Steve Yoneo Muto

Steve Yoneo Muto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 3971684
    Abstract: A method is provided for etching thin film circuits or semiconductor chips to produce well defined vertically etched walls at rapid etching rates. The substrates to be etched are covered by masks and positioned on a cathode electrode enclosed in a container. Also enclosed in the container is a chemically-reactive gas used as an etchant. According to the method the cathode is negative-biased to ionize the reactive gas and attract the chemically reactive ions toward the cathode. These reactive ions impinge on the substrates in a predominantly vertical direction to produce well defined vertically etched walls.
    Type: Grant
    Filed: April 14, 1975
    Date of Patent: July 27, 1976
    Assignee: Hewlett-Packard Company
    Inventor: Steve Yoneo Muto