Abstract: A plurality of ribbon suspenders affix a device to a support structure. Each ribbon suspender is defined by a thickness and a width that is greater than the thickness, and has a first connection portion affixed to the support structure, a second connection portion affixed to the device, and a support portion between the first and second connection portions. The support portion is elastic and flexes to accommodate thermal expansion and contraction of the support structure. A first bond affixes the first connection portion to the support structure and a second bond affixes the second connection portion to the device.

Abstract: A plurality of ribbon suspenders affix a device to a support structure. Each ribbon suspender is defined by a thickness and a width that is greater than the thickness, and has a first connection portion affixed to the support structure, a second connection portion affixed to the device, and a support portion between the first and second connection portions. The support portion is elastic and flexes to accommodate thermal expansion and contraction of the support structure. A first bond affixes the first connection portion to the support structure and a second bond affixes the second connection portion to the device.

Abstract: An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

Abstract: An apparatus and method for operation of a differential capacitance transducer, including generating substantially opposing polarity excitation drive signals by operation of a pair of drive signal generators, applying the excitation drive signals to a pair of sense capacitors of a differential capacitance sensor, sensing a differential capacitance at a common junction between the pair of sense capacitors; and individually controlling the drive signal generators for trimming a null bias of the sense capacitor pair at the common junction.

Abstract: An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

Abstract: An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

Abstract: An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

Abstract: A mechanical resonator having an electrical charge buried and substantially permanently trapped in a layer of insulating material grown or otherwise formed on either or both of the electrode and the vibratory beam, whereby the trapped electrical charge generates electrostatic forces between the beams and the electrodes of the opposing plates of the resultant capacitor.

Abstract: A method for designing a sensor using a dual double-ended tuning forks which provides composite cancellation of second-order non-linearity terms.

Abstract: A net zero isolator having an elongated linear displacement member; and first and second counter rotation members arranged crosswise to the linear displacement member at either end thereof, each of the first and second counter rotation members including a mounting portion spaced apart from an isolated portion on respective first and second sides of the elongated linear displacement member. The elongated linear displacement member and the first and second counter rotation members are structured such that a displacement of the mounting portions along the linear displacement member is balanced by a displacement of the isolated pads. The net zero isolator acts through each of the first and second counter rotation members to generate displacements of the isolated portions that cancel a linear displacement of the mounting portions.

Abstract: An apparatus and method for suspending two or more force-versus-displacement sensors for measuring displacement of a pendular structure relative to a frame structure, wherein a suspension structure includes the frame and pendular structures, the pendular structure having a base structure suspended from the frame structure for rotation about a first axis, a beam structure spaced away from the first axis, and a flexure suspending the beam structure from the base structure for rotation about a second axis that is substantially perpendicular to the first axis. The flexure suspending the beam structure from the base structure is positioned substantially intermediate between suspension positions of the force-versus-displacement sensors, and constrains the beam structure to motion substantially within the plane of the pendular structure.

Abstract: A pendulous accelerometer wherein the active reaction mass is pendulously mounted external to a fixed support structure and may include sensor cover of covers in the total active reaction mass.

Abstract: An apparatus and method for suspending two or more force-versus-displacement sensors for measuring displacement of a pendular structure relative to a frame structure, wherein a suspension structure includes the frame and pendular structures, the pendular structure having a base structure suspended from the frame structure for rotation about a first axis, a beam structure spaced away from the first axis, and a flexure suspending the beam structure from the base structure for rotation about a second axis that is substantially perpendicular to the first axis. The flexure suspending the beam structure from the base structure is positioned substantially intermediate between suspension positions of the force-versus-displacement sensors, and constrains the beam structure to motion substantially within the plane of the pendular structure.

Abstract: A pendulous accelerometer wherein the active reaction mass is pendulously mounted external to a fixed support structure and may include sensor cover or covers in the total active reaction mass.

Abstract: A net zero isolator having an elongated linear displacement member; and first and second counter rotation members arranged crosswise to the linear displacement member at either end thereof, each of the first and second counter rotation members including a mounting portion spaced apart from an isolated portion on respective first and second sides of the elongated linear displacement member. The elongated linear displacement member and the first and second counter rotation members are structured such that a displacement of the mounting portions along the linear displacement member is balanced by a displacement of the isolated pads. The net zero isolator acts through each of the first and second counter rotation members to generate displacements of the isolated portions that cancel a linear displacement of the mounting portions.

Abstract: A method and apparatus for enclosing a sensing device, such as an accelerometer, for reducing outside forces and strains on the sensing device. The cover includes two parts that bond to each other thereby forming a clamshell-type cover. The sensing device can float within the cover, is bonded to bonding points on one of the cover parts or is held in place by a pressure fit of the two cover parts on the sensing device.

Abstract: A method for designing a sensor using a dual double-ended tuning forks which provides composite cancellation of second-order non-linearity terms.

Abstract: Pressure-compensated transducers and accelerometers, and force-sensing and acceleration-sensing methods are described. In a preferred embodiment, regression techniques are utilized in the context of a vibrating beam force transducer to provide a measure of acceleration which is both temperature-compensated and pressure-compensated.

Abstract: A pendulous accelerometer wherein the active reaction mass is pendulously mounted to a fixed support structure and includes sensor cover or covers in the total active reaction mass.

Abstract: A pendulous accelerometer wherein the active reaction mass is pendulously mounted external to a fixed support structure and may include sensor cover or covers in the total active reaction mass.