Patents by Inventor Steven A. Vitale
Steven A. Vitale has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10418350Abstract: A multi-layer semiconductor device includes at least a first semiconductor structure and a second semiconductor structure, each having first and second opposing surfaces. The second semiconductor structure includes a first section and a second section, the second section including a device layer and an insulating layer. The second semiconductor structure also includes one or more conductive structures and one or more interconnect pads. Select ones of the interconnect pads are electrically coupled to select ones of the conductive structures. The multi-layer semiconductor device additionally includes one or more interconnect structures disposed between and coupled to select portions of second surfaces of each of the first and second semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: GrantFiled: August 11, 2015Date of Patent: September 17, 2019Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Patent number: 10079224Abstract: A semiconductor structure includes at least two substrate layers, each of the at least two substrate layers having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes a substrate joining layer disposed between and coupled to the second surface of a first one of the at least two substrate layers and the first surface of a second one of the at least two substrate layers. The substrate joining layer includes at least one integrated circuit (IC) structure disposed between the first and second surfaces of said substrate joining layer. A corresponding method for fabricating a semiconductor structure is also provided.Type: GrantFiled: August 11, 2015Date of Patent: September 18, 2018Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Patent number: 9780075Abstract: A multi-layer semiconductor device includes at least two semiconductor structures, each of the at least two semiconductor structures having first and second opposing surfaces and including a first section and a second section. The second section includes a device layer and an insulating layer. The multi-layer semiconductor device also includes one or more conductive structures and one or more interconnect pads. Select ones of the one or more interconnect pads are electrically coupled to the one or more conductive structures. The multi-layer semiconductor device additionally includes a via joining layer disposed between and coupled to second surfaces of each of the at least two semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: GrantFiled: August 11, 2015Date of Patent: October 3, 2017Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20170200700Abstract: A multi-layer semiconductor device includes at least two semiconductor structures, each of the at least two semiconductor structures having first and second opposing surfaces and including a first section and a second section. The second section includes a device layer and an insulating layer. The multi-layer semiconductor device also includes one or more conductive structures and one or more interconnect pads. Select ones of the one or more interconnect pads are electrically coupled to the one or more conductive structures. The multi-layer semiconductor device additionally includes a via joining layer disposed between and coupled to second surfaces of each of the at least two semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: ApplicationFiled: August 11, 2015Publication date: July 13, 2017Applicant: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20170162507Abstract: A multi-layer semiconductor device includes at least a first semiconductor structure and a second semiconductor structure, each having first and second opposing surfaces. The second semiconductor structure includes a first section and a second section, the second section including a device layer and an insulating layer. The second semiconductor structure also includes one or more conductive structures and one or more interconnect pads. Select ones of the interconnect pads are electrically coupled to select ones of the conductive structures. The multi-layer semiconductor device additionally includes one or more interconnect structures disposed between and coupled to select portions of second surfaces of each of the first and second semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: ApplicationFiled: August 11, 2015Publication date: June 8, 2017Inventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20170162550Abstract: A semiconductor structure includes at least two substrate layers, each of the at least two substrate layers having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes a substrate joining layer disposed between and coupled to the second surface of a first one of the at least two substrate layers and the first surface of a second one of the at least two substrate layers. The substrate joining layer includes at least one integrated circuit (IC) structure disposed between the first and second surfaces of said substrate joining layer. A corres ponding method for fabricating a semiconductor structure is also provided.Type: ApplicationFiled: August 11, 2015Publication date: June 8, 2017Inventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Patent number: 9035399Abstract: A method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related device. At least some of the illustrative embodiments are methods comprising forming a gate stack over a semiconductor substrate (the gate stack comprising a first polysilicon layer, a first nitride layer, and a second polysilicon layer), forming a second nitride layer over an active region in the semiconductor substrate adjacent to the gate stack, performing a chemical mechanical polishing that stops on the first nitride layer and on the second nitride layer, removing the first nitride layer and the second nitride layer, and performing a simultaneous silicidation of the first polysilicon layer and the active region.Type: GrantFiled: March 25, 2010Date of Patent: May 19, 2015Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Freidoon Mehrad, Shaofeng Yu, Steven A. Vitale, Joe G. Tran
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Patent number: 8574980Abstract: A method of forming fully silicided NMOS and PMOS semiconductor devices having independent polysilicon gate thicknesses, and related device. At least some of the illustrative embodiments are methods comprising forming an N-type gate over a semiconductor substrate (the N-type gate having a first thickness), forming a P-type gate over the semiconductor substrate (the P-type gate having a second thickness different than the first thickness), and performing a simultaneous silicidation of the N-type gate and the P-type gate.Type: GrantFiled: April 27, 2007Date of Patent: November 5, 2013Assignee: Texas Instruments IncorporatedInventors: Freidoon Mehrad, Shaofeng Yu, Steven A. Vitale, Craig H. Huffman
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Publication number: 20130056641Abstract: Thermal Neutron Detector. The detector includes at least one semiconductor transistor within a circuit for monitoring current flowing through the semiconductor transistor. A film of gadolinium-containing material covers the semiconductor transistor whereby thermal neutrons interacting with the gadolinium-containing material generate electrons that induce a change in current flowing through the semiconductor transistor to provide neutron detection.Type: ApplicationFiled: June 5, 2012Publication date: March 7, 2013Applicant: Massachusetts Institute of TechnologyInventors: Steven A. Vitale, Pascale Gouker
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Publication number: 20100176462Abstract: A method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related device. At least some of the illustrative embodiments are methods comprising forming a gate stack over a semiconductor substrate (the gate stack comprising a first polysilicon layer, a first nitride layer, and a second polysilicon layer), forming a second nitride layer over an active region in the semiconductor substrate adjacent to the gate stack, performing a chemical mechanical polishing that stops on the first nitride layer and on the second nitride layer, removing the first nitride layer and the second nitride layer, and performing a simultaneous silicidation of the first polysilicon layer and the active region.Type: ApplicationFiled: March 25, 2010Publication date: July 15, 2010Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Freidoon Mehrad, Shaofeng Yu, Steven A. Vitale, Joe G. Tran
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Patent number: 7727842Abstract: A method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related device. At least some of the illustrative embodiments are methods comprising forming a gate stack over a semiconductor substrate (the gate stack comprising a first polysilicon layer, a first nitride layer, and a second polysilicon layer), forming a second nitride layer over an active region in the semiconductor substrate adjacent to the gate stack, performing a chemical mechanical polishing that stops on the first nitride layer and on the second nitride layer, removing the first nitride layer and the second nitride layer, and performing a simultaneous silicidation of the first polysilicon layer and the active region.Type: GrantFiled: April 27, 2007Date of Patent: June 1, 2010Assignee: Texas Instruments IncorporatedInventors: Freidoon Mehrad, Shaofeng Yu, Steven A. Vitale, Joe G. Tran
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Publication number: 20090321846Abstract: A method of forming fully silicided NMOS and PMOS semiconductor devices having independent polysilicon gate thicknesses, and related device. At least some of the illustrative embodiments are methods comprising forming an N-type gate over a semiconductor substrate (the N-type gate having a first thickness), forming a P-type gate over the semiconductor substrate (the P-type gate having a second thickness different than the first thickness), and performing a simultaneous silicidation of the N-type gate and the P-type gate.Type: ApplicationFiled: September 8, 2009Publication date: December 31, 2009Applicant: Texas Instruments IncorporatedInventors: Freidoon Mehrad, Shaofeng Yu, Steven A. Vitale, Craig H. Huffman
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Publication number: 20090057776Abstract: A method of forming fully silicided NMOS and PMOS semiconductor devices having independent polysilicon gate thicknesses, and related device. At least some of the illustrative embodiments are methods comprising forming an N-type gate over a semiconductor substrate (the N-type gate having a first thickness), forming a P-type gate over the semiconductor substrate (the P-type gate having a second thickness different than the first thickness), and performing a simultaneous silicidation of the N-type gate and the P-type gate.Type: ApplicationFiled: April 27, 2007Publication date: March 5, 2009Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Freidoon Mehrad, Shaofeng Yu, Steven A. Vitale, Craig H. Huffman
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Publication number: 20080265344Abstract: A method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related device. At least some of the illustrative embodiments are methods comprising forming a gate stack over a semiconductor substrate (the gate stack comprising a first polysilicon layer, a first nitride layer, and a second polysilicon layer), forming a second nitride layer over an active region in the semiconductor substrate adjacent to the gate stack, performing a chemical mechanical polishing that stops on the first nitride layer and on the second nitride layer, removing the first nitride layer and the second nitride layer, and performing a simultaneous silicidation of the first polysilicon layer and the active region.Type: ApplicationFiled: April 27, 2007Publication date: October 30, 2008Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Freidoon Mehrad, Shaofeng Yu, Steven A. Vitale, Joe G. Tran
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Patent number: 7244642Abstract: The present invention provides a method of fabricating a microelectronics device. In one aspect, the method comprises depositing a protective layer (510) over a spacer material (415) located over gate electrodes (250) and a doped region (255) located between the gate electrodes (250), removing a portion of the spacer material (415) and the protective layer (510) located over the gate electrodes (250). A remaining portion of the spacer material (415) remains over the top surface of the gate electrodes (250) and over the doped region (255), and a portion of the protective layer (510) remains over the doped region (255). The method further comprises removing the remaining portion of the spacer material (415) to form spacer sidewalls on the gate electrodes (250), expose the top surface of the gate electrodes (250), and leave a remnant of the spacer material (415) over the doped region (255).Type: GrantFiled: September 16, 2005Date of Patent: July 17, 2007Assignee: Texas Instruments IncorporatedInventors: Steven A. Vitale, Hyesook Hong, Freidoon Mehrad
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Publication number: 20040168620Abstract: An underground vault security system. The security system includes a portal covering which is capable of being latched, a fluid-operated latching mechanism, and a wireless communication device. The communication device sends signals to a solenoid valve to allow fluid from a fluid source to be transported to the piston to retract the bolt and allow the portal covering to open. In one embodiment, the communication device also sends signals to the solenoid valve to allow fluid from the piston to return to the fluid source, allowing the bolt to extend into and lock the portal covering. In another embodiment, a cable is attached to the bolt and pulled through a one-way ratchet assembly to lock the portal covering.Type: ApplicationFiled: February 27, 2003Publication date: September 2, 2004Inventors: Steven A. Vitale, Michael J. McEnerney, Albert W. Gershman, Anthony L. Schwab