Abstract: A semiconductor substrate includes a first semiconductor layer, a first dielectric layer coupled to the first semiconductor layer, and a second semiconductor layer coupled to the first dielectric layer. The second semiconductor layer includes a base portion substantially aligned with the first dielectric layer and a cantilever portion protruding from an end of the first dielectric layer. The cantilever portion includes a tapered surface tapering from a bottom surface of the second semiconductor layer toward a top surface of the second semiconductor layer.

Abstract: A semiconductor substrate includes a first semiconductor layer, a first dielectric layer coupled to the first semiconductor layer, and a second semiconductor layer coupled to the first dielectric layer. The second semiconductor layer includes a base portion substantially aligned with the first dielectric layer and a cantilever portion protruding from an end of the first dielectric layer. The cantilever portion includes a tapered surface tapering from a bottom surface of the second semiconductor layer toward a top surface of the second semiconductor layer.

Abstract: A method for fabricating a cantilever having a device surface, a tapered surface, and an end region includes providing a semiconductor substrate having a first side and a second side opposite to the first side and etching a predetermined portion of the second side to form a plurality of recesses in the second side. Each of the plurality of recesses comprises an etch termination surface. The method also includes anisotropically etching the etch termination surface to form the tapered surface of the cantilever and etching a predetermined portion of the device surface to release the end region of the cantilever.

Abstract: A waveguide display system may include an eyepiece waveguide that can have a first surface and a second surface, the waveguide including an incoupling diffractive optical element (DOE) and an outcoupling DOE. The waveguide display system may include a light source and a scanning mirror, and may include reflective and collimating optical elements. The incoupling DOE can be configured to selectively propagate incident light beams to the outcoupling DOE in the waveguide through total internal reflection (TIR).

Abstract: A method for fabricating a cantilever having a device surface, a tapered surface, and an end region includes providing a semiconductor substrate having a first side and a second side opposite to the first side and etching a predetermined portion of the second side to form a plurality of recesses in the second side. Each of the plurality of recesses comprises an etch termination surface. The method also includes anisotropically etching the etch termination surface to form the tapered surface of the cantilever and etching a predetermined portion of the device surface to release the end region of the cantilever.

Abstract: A waveguide display system may include an eyepiece waveguide that can have a first surface and a second surface, the waveguide including an incoupling diffractive optical element (DOE) and an outcoupling DOE. The waveguide display system may include a light source and a scanning mirror, and may include reflective and collimating optical elements. The incoupling DOE can be configured to selectively propagate incident light beams to the outcoupling DOE in the waveguide through total internal reflection (TIR).

Abstract: An optical scanner includes a cantilevered optical member protruding from the base portion and a transducer assembly comprising one or more piezoelectric actuators coupled to the cantilevered optical member and configured to induce motion of the cantilevered optical member in a scan pattern. In some cases, the cantilevered optical member has a tapered shape with a distal end narrower than a proximal end adjacent to the base portion of the optical scanner. In some cases, the cantilevered optical member has an elongated width along a first plane and includes a plurality of waveguides. The transducer assembly is configured to induce motion of the cantilevered optical member in a second plane orthogonal to the first plane.