Abstract: One embodiment relates to an apparatus for sputtering material onto a workpiece, the apparatus including a vacuum chamber and a target disposed in the vacuum chamber, the target comprising a material to be deposited onto said workpiece. The apparatus also includes a holder for the workpiece and at least one recyclable process kit component positioned to accumulate material sputtered from the target. The process kit component includes a base metal layer including titanium and an outer layer of titanium nitride. The titanium nitride layer acts as an etch stop during recycling of the process kit component. The process kit component may include a part selected from the group of a shield, pedestal, shutter, coil, collimator, deposition ring, cover ring, and clamp ring.

Abstract: A recyclable process kit part is provided with a visible mark. After the part undergoes a cleaning process that removes deposited material therefrom, the part can be determined to be within tolerance, based on the mark's visibility. More specifically, the recyclable process kit part is made of a material, and has a first surface that has a first elevation. A visual mark is formed in the first surface, and extends to a second elevation, wherein the distance between the first elevation and the second elevation is adapted such that the mark is visible until an amount of the material is removed from the part so as to make the part nearly out of tolerance.