Patents by Inventor Steven Caliendo

Steven Caliendo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND PROCESSING SYSTEMS FOR USING A GAS CLUSTER ION BEAM TO OFFSET SYSTEMATIC NON-UNIFORMITIES IN WORKPIECES PROCESSED IN A PROCESS TOOL
    Publication number: 20080237492
    Abstract: Embodiments of an apparatus and methods for offsetting systematic non-uniformities using a gas cluster ion beam are generally described herein. Other embodiments may be described and claimed.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Steven Caliendo, Nicolaus Hofmeester
  • Method for stabilizing the internal surface of a PECVD process chamber
    Patent number: 6626186
    Abstract: Apparatus and method of processing a substrate comprises positioning a substrate within a processing space of a processing chamber, and depositing a material layer, such as a titanium-containing layer, onto the substrate using plasma-enhanced chemical vapor deposition. The substrate is then removed from the processing chamber and the processing space is purged. A gas mixture containing oxygen is then introduced into the processing space and the gas mixture is excited with RF energy to form an oxygen-containing plasma. The oxygen-containing plasma is sustained for a predetermined amount of time in the processing space.
    Type: Grant
    Filed: November 16, 2000
    Date of Patent: September 30, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Joseph Hillman, Steven Caliendo, Gerrit J. Leusink