Patents by Inventor Steven Catlett

Steven Catlett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR REAL TIME FAULT DETECTION IN HIGH SPEED SEMICONDUCTOR PROCESSES
    Publication number: 20100014748
    Abstract: An apparatus for collecting data during processing of a structure, such as a semiconductor wafer, which includes data collection devices or sensors positioned in a processing chamber for processing the wafer. The data collection sensors may operate at speeds of about 10 Hertz (Hz). A controller communicates and receives data from the data collection sensors. A data processing device communicates with the controller for receiving and processing the data, and the data processing device analyzes the data and determines at least one process response.
    Type: Application
    Filed: July 21, 2008
    Publication date: January 21, 2010
    Applicant: International Business Machines Corporation
    Inventors: Mark L. Reath, Justin W. Wong, Steven Catlett, Michael L. Passow, Harry R. Kolar