Patents by Inventor Steven Chang

Steven Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150041659
    Abstract: Extreme ultraviolet light (EUV) is produced in a laser-produced plasma (LPP) EUV light source when laser light strikes a target. Measuring reflected light from the target by a Return Beam Diagnostics (RBD) module provides data on EUV production, including but not limited to target position, target focus, target shape, and target profile. In a RBD module, a controller sequences an optical switch to direct the reflected light between a blocking element and a sensing device, providing greater flexibility in measuring the reflected light during different aspects of the EUV generation process, such as different power levels and duty cycles of the laser light striking the target.
    Type: Application
    Filed: August 6, 2013
    Publication date: February 12, 2015
    Applicant: Cymer, LLC
    Inventors: Matthew Graham, Robert Bergstedt, Steven Chang
  • Patent number: 8872122
    Abstract: Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: October 28, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Alexander Schafgans, James Crouch, Matthew R. Graham, Steven Chang, Paul Frihauf, Andrew Liu, Wayne Dunstan
  • Publication number: 20140191132
    Abstract: Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
    Type: Application
    Filed: January 10, 2013
    Publication date: July 10, 2014
    Applicant: Cymer, Inc.
    Inventors: Alexander Schafgans, James Crouch, Matthew R. Graham, Steven Chang, Paul Frihauf, Andrew Liu, Wayne Dunstan
  • Publication number: 20140151583
    Abstract: An extreme ultraviolet light system includes a steering system that steers and focuses an amplified light beam traveling along a propagation direction to a focal plane near a target location within an extreme ultraviolet light chamber, a detection system including at least one detector positioned to detect an image of a laser beam reflected from at least a portion of a target material within the chamber, a wavefront modification system in the path of the reflected laser beam and between the target location and the detection system, and a controller. The wavefront modification system is configured to modify the wavefront of the reflected laser beam as a function of a target focal plane position along the propagation direction. The controller includes logic for adjusting a location of the focal plane of the amplified light beam relative to the target material based on the detected image of the reflected laser beam.
    Type: Application
    Filed: February 7, 2014
    Publication date: June 5, 2014
    Inventors: Matthew R. Graham, William N. Partlo, Steven Chang, Robert A. Bergstedt
  • Patent number: 8648999
    Abstract: An extreme ultraviolet light system includes a steering system that steers and focuses an amplified light beam traveling along a propagation direction to a focal plane near a target location within an extreme ultraviolet light chamber, a detection system including at least one detector positioned to detect an image of a laser beam reflected from at least a portion of a target material within the chamber, a wavefront modification system in the path of the reflected laser beam and between the target location and the detection system, and a controller. The wavefront modification system is configured to modify the wavefront of the reflected laser beam as a function of a target focal plane position along the propagation direction. The controller includes logic for adjusting a location of the focal plane of the amplified light beam relative to the target material based on the detected image of the reflected laser beam.
    Type: Grant
    Filed: July 22, 2010
    Date of Patent: February 11, 2014
    Assignee: Cymer, LLC
    Inventors: Matthew R. Graham, William N. Partlo, Steven Chang, Robert A. Bergstedt
  • Publication number: 20130320244
    Abstract: Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam can maintain focus on a target material to generate the plasma that gives off light. The system and method described herein optimize EUV light generation by using a closed-loop gradient process to track and fine-tune in real-time the positioning of optical elements that determine how the laser beam is focused on the target material. When real-time alignment of the drive laser on droplet position is achieved, EUV generation is optimized.
    Type: Application
    Filed: July 13, 2012
    Publication date: December 5, 2013
    Applicant: Cymer, Inc.
    Inventors: Paul Frihauf, Daniel J. Riggs, Matthew R. Graham, Steven Chang, Wayne J. Dunstan
  • Patent number: 8598552
    Abstract: Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam can maintain focus on a target material to generate the plasma that gives off light. The system and method described herein optimize EUV light generation by using a closed-loop gradient process to track and fine-tune in real-time the positioning of optical elements that determine how the laser beam is focused on the target material. When real-time alignment of the drive laser on droplet position is achieved, EUV generation is optimized.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: December 3, 2013
    Assignee: Cymer, Inc.
    Inventors: Paul Frihauf, Daniel J. Riggs, Matthew R. Graham, Steven Chang, Wayne J. Dunstan
  • Publication number: 20130043401
    Abstract: An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material delivery system that provides a target mixture containing a target material in the target region; two or more sensors radially separated from a main axis that crosses the target region, the two or more sensors being configured to detect energy of ultraviolet electromagnetic radiation emitted from a plasma state of the target material when the amplified light beam of pulses intersects the target mixture; and a controller that receives the output from the two or more sensors. The controller is configured to estimate a relative radial alignment between the target mixture and the drive axis within the target region based on an analysis of the detected energy.
    Type: Application
    Filed: September 30, 2011
    Publication date: February 21, 2013
    Applicant: CYMER, INC.
    Inventors: Matthew Graham, Steven Chang, Jim Crouch, Igor Fomenkov
  • Patent number: 8171307
    Abstract: The invention provides for rekeying a large cluster of storage security appliances which allows more than two of the storage security appliances to proxy a single storage medium while encrypting the storage medium in a manner that is transparent to any attached server. The invention provides a method for synchronizing encryption of the disk among a large cluster of storage security appliances, while allowing all of the storage security appliances involved to access the storage device being rekeyed in a secure fashion.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: May 1, 2012
    Assignee: NetApp, Inc.
    Inventor: Steven Chang
  • Publication number: 20120019826
    Abstract: An extreme ultraviolet light system includes a steering system that steers and focuses an amplified light beam traveling along a propagation direction to a focal plane near a target location within an extreme ultraviolet light chamber, a detection system including at least one detector positioned to detect an image of a laser beam reflected from at least a portion of a target material within the chamber, a wavefront modification system in the path of the reflected laser beam and between the target location and the detection system, and a controller. The wavefront modification system is configured to modify the wavefront of the reflected laser beam as a function of a target focal plane position along the propagation direction. The controller includes logic for adjusting a location of the focal plane of the amplified light beam relative to the target material based on the detected image of the reflected laser beam.
    Type: Application
    Filed: July 22, 2010
    Publication date: January 26, 2012
    Applicant: CYMER, INC.
    Inventors: Matthew R. Graham, William N. Partlo, Steven Chang, Robert A. Bergstedt
  • Patent number: 7551057
    Abstract: A remote entry system for a vehicle includes a portable transmitter and a vehicle-mounted receiver. The receiver alternates between a monitoring state lasting for a monitoring period and a sleep state lasting for a sleep period. A remote control is manually activated and a message sequence is transmitted to the receiver in response to the manual activation for initiating a function of the remote entry system. The message sequence comprises a plurality of blocks transmitted at a predetermined block interval, the blocks including a preamble block and at least one message block. If the receiver detects the preamble block then it enters a reception state for detecting the message block. The preamble block has a predetermined preamble length and is comprised of a plurality of bytes separated by respective off intervals between successive bytes. Each off interval comprises a predetermined off period greater than the predetermined byte period.
    Type: Grant
    Filed: November 4, 2005
    Date of Patent: June 23, 2009
    Assignee: Lear Corporation
    Inventors: Ronald O. King, Neal Richard Manson, Steven Chang
  • Publication number: 20090033553
    Abstract: The present invention discloses a GPS system that uses call-processor intelligence to determine the mode of operation of a GPS receiver located in a GPS terminal. The modes are selected based on the availability of network facilities, the GPS information that can be acquired, or user input requirements.
    Type: Application
    Filed: February 18, 2008
    Publication date: February 5, 2009
    Applicants: SiRF Technology, Inc., Matsushita Electric Works, Ltd.
    Inventors: Ikuo Tusjimoto, Junichi Suzuki, Chiayee Steven Chang, Lionel Jacques Garin, Ashutosh Pande
  • Publication number: 20070150699
    Abstract: Methods and apparatuses for firm partitioning of a computing platform.
    Type: Application
    Filed: December 28, 2005
    Publication date: June 28, 2007
    Inventors: Ioannis Schoinas, Doddaballapur Jayasimha, Eric Delano, Allen Baum, Akhilesh Kumar, Steven Chang, Suresh Chittor, Kenneth Creta, Stephen Van Doren
  • Publication number: 20070103271
    Abstract: A remote entry system for a vehicle includes a portable transmitter and a vehicle-mounted receiver. The receiver alternates between a monitoring state lasting for a monitoring period and a sleep state lasting for a sleep period. A remote control is manually activated and a message sequence is transmitted to the receiver in response to the manual activation for initiating a function of the remote entry system. The message sequence comprises a plurality of blocks transmitted at a predetermined block interval, the blocks including a preamble block and at least one message block. If the receiver detects the preamble block then it enters a reception state for detecting the message block. The preamble block has a predetermined preamble length and is comprised of a plurality of bytes separated by respective off intervals between successive bytes. Each off interval comprises a predetermined off period greater than the predetermined byte period.
    Type: Application
    Filed: November 4, 2005
    Publication date: May 10, 2007
    Inventors: Ronald King, Neal Manson, Steven Chang
  • Publication number: 20070053991
    Abstract: Nucleotide and amino acid sequences of cartilage-derived morphogenetic proteins (CDMP-1 and CDMP-2) from human and bovine cartilage extracts. These proteins exhibit chondrogenic activity and can be used to repair cartilage defects in a mammal.
    Type: Application
    Filed: November 3, 2006
    Publication date: March 8, 2007
    Inventors: Frank Luyten, Malcolm Moos, Steven Chang
  • Patent number: 7166822
    Abstract: A device for heating and warming food featuring a base with a central member axially projecting it surface which provides heat from its exterior surface. The base is cooperatively engageable with one or a plurality of cooking containers having central cavities adapted to frictionally engage the central member thereby heating food in the containers from a central axis. Secondary cooking containers are engageable to axial projections in the primary cooking contains to allow two foods to be heated at the same time from a central area.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: January 23, 2007
    Inventors: Peter Chung-Yuan Chang, Steven Chang
  • Publication number: 20060054379
    Abstract: A sound box vibration-proof seat comprises a top center having a tapered portion at one end thereof; another end of the top center being a stud; the stud being installed with a locking sleeve, a washer, a locking nut and a buckling nut; a seat pad having a recess at a top center thereof for receiving the tapered portion; an outer periphery of the seat pad having an inward engaging surface for tightly engaging an open end of the vibration-reduction cover; and a vibration-reduction cover enclosing the tapered portion; the vibration-reduction cover having a close end; and a center of the close end having a through hole. After the sound box has been moved, a time period is required to correct the position of the top center with respect to the seat pad.
    Type: Application
    Filed: September 14, 2004
    Publication date: March 16, 2006
    Inventor: Steven Chang
  • Publication number: 20060005438
    Abstract: An inexpensive, aesthetically pleasing display assembly (10) is provided in the form of an upstanding carrier (12) supporting at least one comestible article (14) such as a multiple-piece simulated candy bouquet (15). The carrier (12) includes a pair of interconnected, angularly oriented panels (20, 22), with the panel (20) having an uppermost open mouth (72) and an elongated passageway (70). The simulated bouquet (15) comprises a plurality of candy pieces (16) each supported by an elongated stem (18). The bouquet stems (18) are inserted into passageway (70), and the panels (20, 22) are separated so as to form a stable, upstanding, self-supporting display assembly (10).
    Type: Application
    Filed: July 7, 2004
    Publication date: January 12, 2006
    Inventors: Steven Chang, Sonia Chang
  • Publication number: 20050154536
    Abstract: A mathematical prognostic in which changes in a number of physiologically significant factors are measured and interpolated to determine a “damage fluction” incident to bacterial infection or other serious inflammation, followed by either or both of in vitro or in vivo investigations of a particular active agent (drug) and adjustment of the model so as better to evaluate the particular active agent. By measuring a large number of physiologically significant factors including, but not limited to, Interleukin 6 (IL-6), Interleukin 10 (IL-10), Nitric Oxide (NO), and others, it is possible to predict life versus death by the damage function, dD/dt. To evaluate one or more drug candidates against inflammation, the mathematical model is applied first, followed by in vivo and/or in vitro investigations, and the in vivo and/or in vitro investigations are in turn used to adjust or to enhance, if applicable, the mathematical model as it is applied to the particular drug candidate.
    Type: Application
    Filed: August 25, 2004
    Publication date: July 14, 2005
    Applicant: The University of Pittsburgh - of the Commonwealth System of Higher Education
    Inventors: Carson Chow, Yoram Vodovotz, Gilles Clermont, Mitchell Fink, John Bartels, Steven Chang
  • Publication number: 20050020282
    Abstract: A virtual satellite system server that collects and transmits aiding and assisting data to satellite positioning system enabled device upon an event occurring or upon receipt of a message where the virtual satellite system server may also have a location server that contains location data and determines which virtual satellite system server may respond to another device seeking aiding or assisting information in order for the other device to determine it's position.
    Type: Application
    Filed: June 23, 2004
    Publication date: January 27, 2005
    Inventors: Ashutosh Pande, Steven Chang, Lionel Garin, Qiyue Zhang