Abstract: A preferred embodiment of the present invention is a gas turbine engine rotor assembly having axially spaced apart forward and aft disks circumferentially disposed about an axis. The forward disk has an aftwardly extending annular forward arm and the aft disk has a forwardly extending annular aft arm. Forward and aft flanges are located at forward and aft ends of the forward and aft arms respectively. Forward and aft pluralities of aligned forward and aft bolt holes extending axially through the forward and aft flanges respectively. A scalloped annular ring having a plurality of circumferentially spaced apart tabs with spaces therebetween is disposed between the flanges. A plurality of ring bolt holes extend axially through the plurality of circumferentially spaced apart tabs such that corresponding ones of the ring, forward, and aft bolt holes are axially aligned.

Abstract: An apparatus and a method of dynamically mixing a slurry for a chemical mechanical polish includes pumping an abrasive (33) and an oxidizer (37) into a first portion (19) of a slurry mixer (11), using a magnetically coupled stirrer (17) to blend the abrasive (33) and the oxidizer (37) into a slurry (41) in the first portion (19) of the slurry mixer (11), transporting the slurry (41) through a diffuser (21) and into a second portion (22) of the slurry mixer (11), keeping the slurry (41) in the second portion (22) of the slurry mixer (11) for a residence time, and, subsequently, using the slurry (41) to chemical mechanical polish a semiconductor substrate (43). The diffuser (21) reduces air entrainment of the slurry (41), and the residence time enables the slurry (41) to be used when it has a maximum polishing rate.

Abstract: Fluorocarbon and water vapor are introduced directly into a plasma in a process chamber, not downstream from the plasma, thereby creating HF vapor to clean the process chamber. The process may also be used to remove a photoresist residue left remaining on a semiconductor wafer.

Abstract: A gas turbine engine hot section combustor liner is provided a non-film cooled portion of a heat transfer wall having a hot surface and a plurality of longitudinally extending micro-grooves disposed in the portion of the wall along the hot surface in a direction parallel to the direction of the hot gas flow. The depth of the micro-grooves is very small and on the order of magnitude of a predetermined laminar sublayer of a turbulent boundary layer. The micro-grooves are sized so as to inhibit heat transfer from the hot gas flow to the hot surface of the wall while reducing NOx emissions of the combustor relative to an otherwise similar combustor having a liner wall portion including film cooling apertures. In one embodiment the micro-grooves are about 0.001 inches deep and have a preferred depth range of from about 0.001 inches to 0.005 inches and which are square, rectangular, or triangular in cross-section and the micro-grooves are spaced about one width apart.

Abstract: An apparatus and method for effecting the disassembly of an annular combustor for the maintenance of very large power generation gas generators such as those used in military aircraft engines, commercial aircraft engines, and smaller power generation turbines. The apparatus utilizes rollers which are attachable to a lower half outer casing. An inversion ring located radially inward from the lower half outer casing is supported by the rollers. By disconnecting a removable upper half outer casing, the combustor segments of a first section of the combustor can be removed. Supports connected to the first section of the combustor are secured by pins to a tool ring which is in turn secured to the inversion ring so as to create a closed path. By removing pins which secure the inversion ring and lower half outer casing to supports connected to a second section of combustor segments, the combustor can be rotated so that the second section of formerly inaccessible segments can be easily removed.