Abstract: Spectrally filtering at least one input beam includes dispersing spectral components of at least one input beam at different respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that the maximum angular separation among the propagation axes of the spectral components changes; receiving a plurality of the dispersed spectral components incident on a reflective surface at a location at which the central rays of each of the spectral components are incident at different points on the reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to a selected output path.

Abstract: Spectrally filtering at least one input beam includes dispersing spectral components of at least one input beam at different respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that the maximum angular separation among the propagation axes of the spectral components changes; receiving a plurality of the dispersed spectral components incident on a reflective surface at a location at which the central rays of each of the spectral components are incident at different points on the reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to a selected output path.

Abstract: Spectrally filtering at least one input beam includes: dispersing spectral components of at least one input beam at respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that a plurality of the spectral components reflect from a single reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to an output spatial mode.

Abstract: For spectrally filtering at least one input beam, a first reflective element is configured to tilt to multiple tilt orientations that each corresponds to a different angle of propagation of at least one input beam. One or more optical elements are configured to change at least some of the relative angles of propagation of the input beam for different tilt orientations of the first reflective element. A spectrally dispersive element is configured to receive the input beam at a location at which the central ray of the input beam is incident at different points on the spectrally dispersive element for each of the tilt orientations, and configured to disperse spectral components of the input beam at different respective angles in a spectral plane. The first reflective element is configured to tilt to select at least one and fewer than all of the dispersed spectral components to be directed to a selected output path.

Abstract: For spectrally filtering at least one input beam, a first reflective element is configured to tilt to multiple tilt orientations that each corresponds to a different angle of propagation of at least one input beam. One or more optical elements are configured to change at least some of the relative angles of propagation of the input beam for different tilt orientations of the first reflective element. A spectrally dispersive element is configured to receive the input beam at a location at which the central ray of the input beam is incident at different points on the spectrally dispersive element for each of the tilt orientations, and configured to disperse spectral components of the input beam at different respective angles in a spectral plane. The first reflective element is configured to tilt to select at least one and fewer than all of the dispersed spectral components to be directed to a selected output path.

Abstract: Spectrally filtering at least one input beam includes dispersing spectral components of at least one input beam at different respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that the maximum angular separation among the propagation axes of the spectral components changes; receiving a plurality of the dispersed spectral components incident on a reflective surface at a location at which the central rays of each of the spectral components are incident at different points on the reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to a selected output path.

Abstract: Spectrally filtering at least one input beam includes: dispersing spectral components of at least one input beam at respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that a plurality of the spectral components reflect from a single reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to an output spatial mode.

Abstract: A method is provided for assembling an optical collimator array. The method begins by directing light through a first optical collimator to produce a first optical output beam. The first collimator is supported by a first carrier element. The first collimator is rotated about its central longitudinal axis to adjust a position of the first optical output beam on a surface that intercepts the first optical output beam. The first carrier element is then rotated about a carrier axis perpendicular to the central longitudinal axis and in a plane containing the central longitudinal axis to further adjust the position of the first optical output beam on the surface. The first collimator continues to be rotated about these axes until the first optical output beam is located at a desired position on the surface, at which point the first optical collimator is secured to the first carrier element. Next, the first carrier element itself is secured to prevent rotation about the carrier axis.

Abstract: A thermal processing system and method for processing a semiconductor substrate. A lamp system radiates through a window to heat the substrate. A dual gas manifold provides purge gas through a top showerhead to prevent deposits on the window and provides gas through a lower showerhead to deposit a material on the substrate. A thin support and a radiative cavity with thin radiation shields is used to support and insulate the substrate. A peripheral heater also heats the edges to enhance uniformity. An opaque quartz liner is used to reduce contaminants and undesired deposits and simplify cleaning.