Abstract: An apparatus and method for cleaning needle probe tips includes a spray nozzle that is shaped to fit in a needle-tip aperture formed by a plurality of needle probes. The spray nozzle includes a plurality of openings through which a fluid can be sprayed onto the probe tips to blast debris off of the probe tips. The openings preferably spray fluid at differing angles to ensure that debris is removed from the entire probe tip surface.

Abstract: A probe head replaces the probe card conventionally used to electrically test circuits on semiconductor wafers. Within the probe head, an array of pins is biased in a retracted position. A corresponding array of leads is biased in an extended position. By clamping a selector card with one or more apertures between the pin array and the nail array allows selected leads to extend into contact with corresponding pins so as to extend those pins for use in testing a wafer. The selector card can be quickly replaced to obtain a different pin pattern in the probe head. The probe head is movably mounted so as to be positioned, and appropriately repositioned, with respect to the wafer being tested.

Abstract: A probe polish burnishing assembly has a stem having a substantially spherical surface. This spherical surface makes intimate contact with the concave surfaces commonly present at the tips of set screws used to align the assembly, decreasing the likelihood of slippage and chipping of the stem. Alignment of the assembly is thus made more precise, and the useful life of the assembly is improved. Furthermore, the likelihood of damage to the probe during burnishing is lessened.

Abstract: A semiconductor wafer testing and inspecting apparatus and method are provided in which a plurality of tests are performed on each of a plurality of wafers from a wafer cassette and before the wafers are returned to a packaging cassette or further processing. A carousel conveyor receives each wafer from a cassette and indexes it through each of a plurality of testing stations, including preferably at least two electrical testing stations at which a probe contacts each device or die on the wafer to perform an electrical test, with the two stations performing different electrical tests. The wafers are each moved through at least one visual or optical testing station at which each of the dies on the wafer is inspected. Preferably, a testing head or probe is moved in a plane parallel to the wafer sequentially to positions over each of the devices on the wafer to perform a test on or otherwise inspect the devices on the wafer.

Abstract: In order to transport delicate equipment, unstable/hazardous liquids or the like, from one point to another, a cart, or similar form of conveyance, is provided with one or more tables or platforms which are pivotally supported and connected to a relatively large mass. The mass exhibits sufficient inertia that changes in cart orientation, as the cart traverses inclines or the effects of sudden cart accelerations or decelerations are compensated for by the inertial-controlled pivotal movement of the table.

Abstract: In order to quickly and inexpensively rinse recyclable acid bottles which contain acid residues or decontaminate pieces of apparatus which are contaminated with acid, the interior of the bottles or apparatus is rinsed with an alkaline solution and then with water. The exterior of the bottles or apparatus is rinsed with water. The alkaline solution is stored in fiberglass canisters and is displaced to spray nozzles by the application of air under pressure. Valves which control the supply of water and alkaline solution are controlled by either solenoids or by air-activated devices. In the case of air-activated valves the air under pressure which is used to force the alkaline solution toward the spray nozzles can be used to operate the valves.

Abstract: In order to quickly and inexpensively rinse recyclable acid bottles which contain acid residues or decontaminate pieces of apparatus which are contaminated with acid, the interior of the bottles or apparatus is rinsed with an alkaline solution and then with water. The exterior of the bottles or apparatus is rinsed with water. The alkaline solution is stored in fiberglass canisters and is displaced to spray nozzles by the application of air under pressure. Valves which control the supply of water and alkaline solution are controlled by either solenoids or by air-activated devices. In the case of air-activated valves the air under pressure which is used to force the alkaline solution toward the spray nozzles can be used to operate the valves.

Abstract: Apparatus for neutralizing a heating element contaminated with acid. A housing is provided which receives water and a base material. The water and base material combine within the housing to form a neutralizing agent. The neutralizing agent is then passed through the heating element in order to neutralize the heating element for safe disposal as municipal waste.

Abstract: A cart for maintaining items, which are used in a cleanroom, at a predetermined cleanliness level. The cart includes a cabinet having an internal cavity and opposed first and second internal walls. The cart further includes a shelf affixed horizontally within the cavity to form top and lower compartments within the cabinet. In addition, a lower horizontal track is affixed to the cabinet above the top compartment. A lower door is slidably affixed within the lower track. Additionally, the cart includes an upper horizontal track affixed to the cabinet above the lower track and an upper door slidably affixed within the upper track, wherein the upper and lower doors are movable in a horizontal direction above the top compartment. The top compartment is substantially isolated from contamination when the upper door contacts the first wall and the lower door contacts the second wall or when the upper door contacts the second wall and the lower door contacts the first wall.