Abstract: A filter predicted capacity estimation system is presented that includes a parameter retriever that retrieves parameter information for an atmosphere around the filter. The system includes a parameter trend retriever that retrieves historical parameter indications from a database. The system also includes a real time capacity estimator that, based on the parameter information retrieved, and solves a set of controlling equations to generate an estimated capacity. The controlling equations are a set of mass and energy balance equations. The system also includes a parameter projection generator that, based on the historic parameter indications, generates a future parameter trend for the atmosphere and filter use. The system also includes a predicted capacity estimator that, based on the adsorption estimate, and based on the future parameter trend, generates a predicted capacity estimate.

Abstract: Embodiments of the disclosure are directed to PEALD batch processing chambers. Some embodiments are directed to processing chambers having one or more inductively coupled plasma (ICP) coils electrically connected to at least one RF power source. Some embodiments are directed to processing chambers having a wafer cassette comprising a plurality of platforms, each platform configured to support at least one wafer for processing, and one or more RF power sources electrically connected to the plurality of platforms in the wafer cassette. In some embodiments, the plurality of platforms have a first set of electrodes having a first polarity and a second set of electrodes having a second polarity, and one or more RF power sources electrically connected to the plurality of platforms in the wafer cassette.

Abstract: A movement detection device includes a signal transmission device configured to transmit a radar signal transmission toward a target area and to receive reflected radar signals, and a signal analysis device configured to analyze the reflected radar signals to detect a movement in the target area that is indicative of micro-shivering. In response to detecting the micro-shivering, the movement detection device generates an alarm.

Abstract: The present disclosure relates generally to an air filter media. In one embodiment, the air filter media includes a nonwoven fabric substrate, and a nanofiber layer formed on a surface of the nonwoven fabric substrate. A fiber diameter of the nonwoven fabric substrate is from 100 nm to 400 nm.